| 11728187 |
Method for decreasing cool down time with heated system for semiconductor manufacturing equipment |
John F. Baggett |
2023-08-15 |
| 11670483 |
High power wafer cooling |
— |
2023-06-06 |
| 10832926 |
High throughput serial wafer handling end station |
Robert J. Mitchell |
2020-11-10 |
| 10041789 |
Integrated emissivity sensor alignment characterization |
John F. Baggett |
2018-08-07 |
| 9607803 |
High throughput cooled ion implantation system and method |
Armin Huseinovic, Brian Terry |
2017-03-28 |
| 9378992 |
High throughput heated ion implantation system and method |
Armin Huseinovic, Brian Terry |
2016-06-28 |
| 7949425 |
High throughput wafer notch aligner |
Robert J. Mitchell |
2011-05-24 |
| 7750320 |
System and method for two-dimensional beam scan across a workpiece of an ion implanter |
Bo H. Vanderberg, Michael Graf |
2010-07-06 |
| 7699574 |
Work-piece processing system |
— |
2010-04-20 |
| 7375355 |
Ribbon beam ion implanter cluster tool |
Patrick Splinter, Michael Graf, Victor M. Benveniste |
2008-05-20 |
| 7276712 |
Method and apparatus for scanning a workpiece in a vacuum chamber of an ion beam implanter |
— |
2007-10-02 |
| 7246985 |
Work-piece processing system |
— |
2007-07-24 |
| 7172221 |
Pipe stabilizing system |
— |
2007-02-06 |
| 7112808 |
Wafer 2D scan mechanism |
Michael Ioannou, Mehran Asdigha |
2006-09-26 |
| 6992310 |
Scanning systems and methods for providing ions from an ion beam to a workpiece |
Michael Graf, Bo H. Vanderberg |
2006-01-31 |
| 6992309 |
Ion beam measurement systems and methods for ion implant dose and uniformity control |
Klaus Petry, Klaus Becker |
2006-01-31 |
| 6900444 |
Adjustable implantation angle workpiece support structure for an ion beam implanter |
Robert J. Mitchell |
2005-05-31 |
| 6774373 |
Adjustable implantation angle workpiece support structure for an ion beam implanter |
— |
2004-08-10 |
| 6710360 |
Adjustable implantation angle workpiece support structure for an ion beam implanter |
— |
2004-03-23 |