Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770261 | System and method to monitor glitch energy | Larry G. Nelson | 2020-09-08 |
| 10739208 | Semiconductor workpiece temperature measurement system | Jason M. Schaller, Ala Moradian, Morgan Evans | 2020-08-11 |
| 9933314 | Semiconductor workpiece temperature measurement system | Jason M. Schaller, Ala Moradian, Morgan Evans | 2018-04-03 |
| 9103564 | Solar energy converter and method for converting solar energy | Ralph B. Ahlgren, A. Michael Flores | 2015-08-11 |
| 9029683 | Self-contained, multi-fluid energy conversion and management system for converting solar energy to electric and thermal energy | Ralph B. Ahlgren, A. Michael Flores | 2015-05-12 |
| 8987639 | Electrostatic chuck with radiative heating | James C. Carroll | 2015-03-24 |
| 8766209 | Current limiter for high voltage power supply used with ion implantation system | Klaus Becker, Piotr Lubicki | 2014-07-01 |
| 8722431 | FinFET device fabrication using thermal implantation | Nilay A. Pradhan, Stanislav S. Todorov, Kurt Decker-Lucke, Benjamin Colombeau, Baonian Guo | 2014-05-13 |
| 8592786 | Platen clamping surface monitoring | David E. Suuronen, Julian G. Blake, Kurt Decker-Lucke, James C. Carroll | 2013-11-26 |
| 8531814 | Removal of charge between a substrate and an electrostatic clamp | Dale K. Stone, Lyudmila Stone, David E. Suuronen, Julian G. Blake | 2013-09-10 |
| 7828504 | Combination load lock for handling workpieces | Michel Pharand, Klaus Becker, Marvin R. LaFontaine, Michael R. Mitrano | 2010-11-09 |
| 7381969 | Load lock control | Tariq Fasheh, James C. Carroll, Dale K. Stone, Lyudmila Stone, Dave Wiederspahn | 2008-06-03 |
| 7105840 | Ion source for use in an ion implanter | Klaus Becker, Werner Baer | 2006-09-12 |
| 6992309 | Ion beam measurement systems and methods for ion implant dose and uniformity control | Joseph Ferrara, Klaus Becker | 2006-01-31 |
| 6552892 | Method and apparatus for the grounding of process wafers by the use of conductive regions created by ion implantation into the surface of an electrostatic clamp | James C. Carroll, Dennis Klesel, Bryan C. Lagos | 2003-04-22 |
| 5695396 | Ventilating system for reducing contaminations in the air of an aircraft | Michael Markwart, Thomas Scherer | 1997-12-09 |
| 5545084 | Method and apparatus for air conditioning two passenger decks of an aircraft | Heinz Fischer, Thomas Scherer, Michael Markwart | 1996-08-13 |