Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7352554 | Method for fabricating a Johnsen-Rahbek electrostatic wafer clamp | — | 2008-04-01 |
| 6779263 | Method for molding a polymer surface that reduces particle generation and surface adhesion forces while maintaining a high heat transfer coefficient | — | 2004-08-24 |
| 6593699 | Method for molding a polymer surface that reduces particle generation and surface adhesion forces while maintaining a high heat transfer coefficient | — | 2003-07-15 |
| 6583428 | Apparatus for the backside gas cooling of a wafer in a batch ion implantation system | David J. Chipman, Robert J. Mitchell, Gary J. Rosen, Dale K. Stone | 2003-06-24 |
| 6552892 | Method and apparatus for the grounding of process wafers by the use of conductive regions created by ion implantation into the surface of an electrostatic clamp | James C. Carroll, Dennis Klesel, Klaus Petry | 2003-04-22 |
| 5925479 | Moisture barrier composite film of silicon nitride and fluorocarbon polymer and its use with an on-cell tester for an electrochemical cell | Guang-Xue Wei, Jack Treger | 1999-07-20 |
| 5681666 | Light transparent multilayer moisture barrier for electrochemical celltester and cell employing same | Jack Treger, John Fenn, H. Frank Gibbard, Guang-Xue Wei | 1997-10-28 |
| 5607789 | Light transparent multilayer moisture barrier for electrochemical cell tester and cell employing same | Jack Treger, John Fenn, H. Frank Gibbard, Guang-Xue Wei | 1997-03-04 |
| 5593794 | Moisture barrier composite film of silicon nitride and fluorocarbon polymer and its use with an on-cell tester for an electrochemical cell | Guang-Xue Wei, Jack Treger | 1997-01-14 |