| 7352554 |
Method for fabricating a Johnsen-Rahbek electrostatic wafer clamp |
— |
2008-04-01 |
| 6779263 |
Method for molding a polymer surface that reduces particle generation and surface adhesion forces while maintaining a high heat transfer coefficient |
— |
2004-08-24 |
| 6593699 |
Method for molding a polymer surface that reduces particle generation and surface adhesion forces while maintaining a high heat transfer coefficient |
— |
2003-07-15 |
| 6583428 |
Apparatus for the backside gas cooling of a wafer in a batch ion implantation system |
David J. Chipman, Robert J. Mitchell, Gary J. Rosen, Dale K. Stone |
2003-06-24 |
| 6552892 |
Method and apparatus for the grounding of process wafers by the use of conductive regions created by ion implantation into the surface of an electrostatic clamp |
James C. Carroll, Dennis Klesel, Klaus Petry |
2003-04-22 |
| 5925479 |
Moisture barrier composite film of silicon nitride and fluorocarbon polymer and its use with an on-cell tester for an electrochemical cell |
Guang-Xue Wei, Jack Treger |
1999-07-20 |
| 5681666 |
Light transparent multilayer moisture barrier for electrochemical celltester and cell employing same |
Jack Treger, John Fenn, H. Frank Gibbard, Guang-Xue Wei |
1997-10-28 |
| 5607789 |
Light transparent multilayer moisture barrier for electrochemical cell tester and cell employing same |
Jack Treger, John Fenn, H. Frank Gibbard, Guang-Xue Wei |
1997-03-04 |
| 5593794 |
Moisture barrier composite film of silicon nitride and fluorocarbon polymer and its use with an on-cell tester for an electrochemical cell |
Guang-Xue Wei, Jack Treger |
1997-01-14 |