| 9057146 |
Eddy current thickness measurement apparatus |
Frank Sinclair, Alexander Soskov, James S. Buff |
2015-06-16 |
| 7833351 |
Batch processing platform for ALD and CVD |
Aaron P. Webb, Adam Brailove, Joseph Yudovsky, Nir Merry, Andrew J. Constant +3 more |
2010-11-16 |
| 7311779 |
Heating apparatus to heat wafers using water and plate with turbolators |
Son T. Nguyen, Ian Pancham |
2007-12-25 |
| 7223308 |
Apparatus to improve wafer temperature uniformity for face-up wet processing |
Ian Pancham, Son T. Nguyen |
2007-05-29 |
| 6583428 |
Apparatus for the backside gas cooling of a wafer in a batch ion implantation system |
David J. Chipman, Bryan C. Lagos, Robert J. Mitchell, Dale K. Stone |
2003-06-24 |
| 6065499 |
Lateral stress relief mechanism for vacuum bellows |
Alexander F. Pless, Allan D. Weed, Ernest E. Allen, Victor M. Benveniste, Perry J. I. Justesen |
2000-05-23 |
