Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11631588 | Method and apparatus for non line-of-sight doping | Christopher R. Hatem, Piero Sferlazzo, Roger B. Fish | 2023-04-18 |
| 11473978 | Enhanced substrate temperature measurement apparatus, system and method | Dawei Sun, D. Jeffrey Lischer, Qin Chen, Lyudmila Stone, Steven M. Anella +2 more | 2022-10-18 |
| 10658207 | Platen for reducing particle contamination on a substrate and a method thereof | David E. Suuronen, Shigeo Oshiro, Arthur P. Riaf, Edward D. MacIntosh | 2020-05-19 |
| 10541137 | Method and apparatus for non line-of-sight doping | Christopher R. Hatem, Piero Sferlazzo, Roger B. Fish | 2020-01-21 |
| 10385454 | Diffusion resistant electrostatic clamp | Richard A. Cooke, I-Kuan Lin, Julian G. Blake, Lyudmila Stone | 2019-08-20 |
| 10157764 | Thermal shield for electrostatic chuck | David J. Chipman | 2018-12-18 |
| 9953849 | Platen for reducing particle contamination on a substrate and a method thereof | David E. Suuronen, Shigeo Oshiro, Arthur P. Riaf, Edward D. MacIntosh | 2018-04-24 |
| 9692325 | High conductivity electrostatic chuck | David E. Suuronen, Lyudmila Stone, Julian G. Blake, Richard A. Cooke, Steven Donnell +1 more | 2017-06-27 |
| 9644269 | Diffusion resistant electrostatic clamp | Richard A. Cooke, I-Kuan Lin, Julian G. Blake, Lyudmila Stone | 2017-05-09 |
| 9633875 | Apparatus for improving temperature uniformity of a workpiece | Dawei Sun, D. Jeffrey Lischer, Steven M. Anella, Lyudmila Stone | 2017-04-25 |
| 9082804 | Triboelectric charge controlled electrostatic clamp | Julian G. Blake, Lyudmila Stone, David E. Suuronen, Shigeo Oshiro | 2015-07-14 |
| 9025305 | High surface resistivity electrostatic chuck | Richard A. Cooke, Lyudmila Stone, Julian G. Blake, David E. Suuronen | 2015-05-05 |
| 8681472 | Platen ground pin for connecting substrate to ground | David E. Suuronen, Shigeo Oshiro, Arthur P. Riaf, Edward D. MacIntosh | 2014-03-25 |
| 8672311 | Method of cooling textured workpieces with an electrostatic chuck | Julian G. Blake, D. Jeffrey Lischer | 2014-03-18 |
| 8598021 | Method for junction avoidance on edge of workpieces | Julian G. Blake | 2013-12-03 |
| 8531814 | Removal of charge between a substrate and an electrostatic clamp | Lyudmila Stone, Klaus Petry, David E. Suuronen, Julian G. Blake | 2013-09-10 |
| 7751172 | Sliding wafer release gripper/wafer peeling gripper | Ashwin M. Purohit, Dave Broyer, Steve Drummond | 2010-07-06 |
| 7715170 | Electrostatic chuck with separated electrodes | Julian G. Blake, Lyudmila Stone, David E. Suuronen | 2010-05-11 |
| 7381969 | Load lock control | Tariq Fasheh, James C. Carroll, Klaus Petry, Lyudmila Stone, Dave Wiederspahn | 2008-06-03 |
| 7205556 | Bellows liner for an ion beam implanter | Lyudmila Stone, Scott Barusso, Alexander S. Perel | 2007-04-17 |
| 7173260 | Removing byproducts of physical and chemical reactions in an ion implanter | Maria J. Anc, Christopher T. Reddy | 2007-02-06 |
| 7151658 | High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer | Peter L. Kellerman, Victor M. Benveniste, Michel Pharand | 2006-12-19 |
| 6583428 | Apparatus for the backside gas cooling of a wafer in a batch ion implantation system | David J. Chipman, Bryan C. Lagos, Robert J. Mitchell, Gary J. Rosen | 2003-06-24 |
| 5670217 | Method for capturing and removing contaminant particles from an interior region of an ion implanter | Julian G. Blake, Robert Becker, David J. Chipman, Mary Jones, Lyudmila Menn +1 more | 1997-09-23 |
| 5656092 | Apparatus for capturing and removing contaminant particles from an interior region of an ion implanter | Julian G. Blake, Robert Becker, David J. Chipman, Mary Jones, Lyudmila Menn +1 more | 1997-08-12 |