TF

Tariq Fasheh

AT Axcelis Technologies: 1 patents #165 of 300Top 60%
📍 Beverly, MA: #308 of 490 inventorsTop 65%
🗺 Massachusetts: #56,664 of 88,656 inventorsTop 65%
Overall (All Time): #3,357,698 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7381969 Load lock control James C. Carroll, Klaus Petry, Dale K. Stone, Lyudmila Stone, Dave Wiederspahn 2008-06-03