Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10186446 | Adjustable circumference electrostatic clamp | — | 2019-01-22 |
| 9911636 | Multiple diameter in-vacuum wafer handling | — | 2018-03-06 |
| 8941968 | Heated electrostatic chuck including mechanical clamp capability at high temperature | Perry J. I. Justesen, William Davis Lee, Ashwin M. Purohit, Robert D. Rathmell, Gary Cook | 2015-01-27 |
| 8797706 | Heated annulus chuck | William Davis Lee, Gary Cook, Perry J. I. Justesen, Ashwin M. Purohit, Robert D. Rathmell | 2014-08-05 |
| 7954627 | Bin transporter system | Brian Weed, Steven Weed | 2011-06-07 |
| 7789443 | Workpiece gripping device | Joseph Gillespie, Alexander H. Slocum | 2010-09-07 |
| 7010388 | Work-piece treatment system having load lock and buffer | Robert J. Mitchell, Richard Gueler | 2006-03-07 |
| 6914251 | Alignment structure and method for mating a wafer delivery device to a wafer treatment tool | Steven Weed | 2005-07-05 |
| 6734439 | Wafer pedestal tilt mechanism and cooling system | Roger B. Fish | 2004-05-11 |
| 6727509 | Wafer pedestal tilt mechanism | Michel Pharand | 2004-04-27 |
| 6065499 | Lateral stress relief mechanism for vacuum bellows | Alexander F. Pless, Gary J. Rosen, Ernest E. Allen, Victor M. Benveniste, Perry J. I. Justesen | 2000-05-23 |