| 10186446 |
Adjustable circumference electrostatic clamp |
— |
2019-01-22 |
| 9911636 |
Multiple diameter in-vacuum wafer handling |
— |
2018-03-06 |
| 8941968 |
Heated electrostatic chuck including mechanical clamp capability at high temperature |
Perry J. I. Justesen, William Davis Lee, Ashwin M. Purohit, Robert D. Rathmell, Gary Cook |
2015-01-27 |
| 8797706 |
Heated annulus chuck |
William Davis Lee, Gary Cook, Perry J. I. Justesen, Ashwin M. Purohit, Robert D. Rathmell |
2014-08-05 |
| 7954627 |
Bin transporter system |
Brian Weed, Steven Weed |
2011-06-07 |
| 7789443 |
Workpiece gripping device |
Joseph Gillespie, Alexander H. Slocum |
2010-09-07 |
| 7010388 |
Work-piece treatment system having load lock and buffer |
Robert J. Mitchell, Richard Gueler |
2006-03-07 |
| 6914251 |
Alignment structure and method for mating a wafer delivery device to a wafer treatment tool |
Steven Weed |
2005-07-05 |
| 6734439 |
Wafer pedestal tilt mechanism and cooling system |
Roger B. Fish |
2004-05-11 |
| 6727509 |
Wafer pedestal tilt mechanism |
Michel Pharand |
2004-04-27 |
| 6065499 |
Lateral stress relief mechanism for vacuum bellows |
Alexander F. Pless, Gary J. Rosen, Ernest E. Allen, Victor M. Benveniste, Perry J. I. Justesen |
2000-05-23 |