Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9006692 | Apparatus and techniques for controlling ion implantation uniformity | Stanislav S. Todorov, George M. Gammel, Richard Allen Sprenkle, Norman E. Hussey, Frank Sinclair +3 more | 2015-04-14 |
| 8853653 | Apparatus and techniques for controlling ion implantation uniformity | Stanislav S. Todorov, George M. Gammel, Richard Allen Sprenkle, Norman E. Hussey, Frank Sinclair +3 more | 2014-10-07 |
| 8722431 | FinFET device fabrication using thermal implantation | Nilay A. Pradhan, Stanislav S. Todorov, Klaus Petry, Benjamin Colombeau, Baonian Guo | 2014-05-13 |
| 8592786 | Platen clamping surface monitoring | David E. Suuronen, Julian G. Blake, James C. Carroll, Klaus Petry | 2013-11-26 |