Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946403 | Method of making a MEMS electrostatic chuck | Peter L. Kellerman, Shu Qin, Douglas Brown | 2005-09-20 |
| 6905984 | MEMS based contact conductivity electrostatic chuck | Peter L. Kellerman, Shu Qin, Douglas Brown | 2005-06-14 |
| 5009806 | Calcium hypochlorite article | Harlan B. Johnson, Charles R. Wiedrich, Peter P. Howell | 1991-04-23 |
| 4970020 | Calcium hypochlorite composition | Harlan B. Johnson, Charles R. Wiedrich, Peter P. Howell | 1990-11-13 |