Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7994487 | Control of particles on semiconductor wafers when implanting boron hydrides | — | 2011-08-09 |
| 7697617 | Synchronisation method and apparatus for OFDM symbols | — | 2010-04-13 |
| 7453160 | Simplified wafer alignment | — | 2008-11-18 |
| 7417242 | Method of measuring ion beam position | — | 2008-08-26 |
| 6992308 | Modulating ion beam current | Michael Graf | 2006-01-31 |
| 6989545 | Device and method for measurement of beam angle and divergence | Robert D. Rathmell, Douglas Brown | 2006-01-24 |
| 6953942 | Ion beam utilization during scanned ion implantation | Michael Graf | 2005-10-11 |
| 6940079 | Method of correction for wafer crystal cut error in semiconductor processing | — | 2005-09-06 |
| 6903350 | Ion beam scanning systems and methods for improved ion implantation uniformity | Bo H. Vanderberg, Kevin W. Wenzel | 2005-06-07 |
| 6881967 | Method of correction for wafer crystal cut error in semiconductor processing | — | 2005-04-19 |
| 5406088 | Scan and tilt apparatus for an ion implanter | Robert A. Brune | 1995-04-11 |
| 5229615 | End station for a parallel beam ion implanter | Robert A. Brune, Dorsey T. Smith | 1993-07-20 |
| 5160846 | Method and apparatus for reducing tilt angle variations in an ion implanter | — | 1992-11-03 |
| 5091655 | Reduced path ion beam implanter | Jerald P. Dykstra, Monroe L. King | 1992-02-25 |
| 4975586 | Ion implanter end station | — | 1990-12-04 |
| 4943728 | Beam pattern control system for an ion implanter | Jerald P. Dykstra | 1990-07-24 |
| 4929840 | Wafer rotation control for an ion implanter | Jerald P. Dykstra | 1990-05-29 |
| 4700077 | Ion beam implanter control system | Jerald P. Dykstra, Monroe L. King | 1987-10-13 |