| 7994487 |
Control of particles on semiconductor wafers when implanting boron hydrides |
— |
2011-08-09 |
| 7697617 |
Synchronisation method and apparatus for OFDM symbols |
— |
2010-04-13 |
| 7453160 |
Simplified wafer alignment |
— |
2008-11-18 |
| 7417242 |
Method of measuring ion beam position |
— |
2008-08-26 |
| 6992308 |
Modulating ion beam current |
Michael Graf |
2006-01-31 |
| 6989545 |
Device and method for measurement of beam angle and divergence |
Robert D. Rathmell, Douglas Brown |
2006-01-24 |
| 6953942 |
Ion beam utilization during scanned ion implantation |
Michael Graf |
2005-10-11 |
| 6940079 |
Method of correction for wafer crystal cut error in semiconductor processing |
— |
2005-09-06 |
| 6903350 |
Ion beam scanning systems and methods for improved ion implantation uniformity |
Bo H. Vanderberg, Kevin W. Wenzel |
2005-06-07 |
| 6881967 |
Method of correction for wafer crystal cut error in semiconductor processing |
— |
2005-04-19 |
| 5406088 |
Scan and tilt apparatus for an ion implanter |
Robert A. Brune |
1995-04-11 |
| 5229615 |
End station for a parallel beam ion implanter |
Robert A. Brune, Dorsey T. Smith |
1993-07-20 |
| 5160846 |
Method and apparatus for reducing tilt angle variations in an ion implanter |
— |
1992-11-03 |
| 5091655 |
Reduced path ion beam implanter |
Jerald P. Dykstra, Monroe L. King |
1992-02-25 |
| 4975586 |
Ion implanter end station |
— |
1990-12-04 |
| 4943728 |
Beam pattern control system for an ion implanter |
Jerald P. Dykstra |
1990-07-24 |
| 4929840 |
Wafer rotation control for an ion implanter |
Jerald P. Dykstra |
1990-05-29 |
| 4700077 |
Ion beam implanter control system |
Jerald P. Dykstra, Monroe L. King |
1987-10-13 |