Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8319196 | Technique for low-temperature ion implantation | Jonathan Gerald England, Steven R. Walther, Richard S. Muka, Julian G. Blake, Paul J. Murphy | 2012-11-27 |
| 7993698 | Techniques for temperature controlled ion implantation | Julian G. Blake, Jonathan Gerald England, Scott C. Holden, Steven R. Walther, Richard S. Muka +4 more | 2011-08-09 |
| 7935942 | Technique for low-temperature ion implantation | Jonathan Gerald England, Steven R. Walther, Richard S. Muka, Julian G. Blake, Paul J. Murphy | 2011-05-03 |
| 6762423 | Methods and apparatus for ion beam neutralization in magnets | Bjorn O. Pedersen | 2004-07-13 |
| 6020592 | Dose monitor for plasma doping system | Bjorn O. Pedersen, Matthew J. Goeckner | 2000-02-01 |
| 4724324 | Method and apparatus for ion beam centroid location | — | 1988-02-09 |
| 4512812 | Method for reducing phosphorous contamination in a vacuum processing chamber | Carl J. Russo | 1985-04-23 |