Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9269536 | Double ended electrode manipulator | Jon Ballou, Jeannot Morin, Joseph C. Olson | 2016-02-23 |
| 8809803 | Inductively coupled plasma ion source with multiple antennas for wide ion beam | Costel Biloiu, Joseph C. Olson, Edward W. Bell | 2014-08-19 |
| 8124947 | Ion implanter having combined hybrid and double mechanical scan architecture | Patrick Splinter, Bo H. Vanderberg | 2012-02-28 |
| 7858955 | System and method of controlling broad beam uniformity | Shu Satoh, Edward C. Eisner | 2010-12-28 |
| 7842931 | Extraction electrode manipulator | Shu Satoh, John A. Adamik | 2010-11-30 |
| 7705328 | Broad ribbon beam ion implanter architecture with high mass-energy capability | Shu Satoh | 2010-04-27 |
| 7586111 | Ion implanter having combined hybrid and double mechanical scan architecture | Patrick Splinter, Bo H. Vanderberg | 2009-09-08 |
| 7059817 | Wafer handling apparatus and method | Nicholas R. White | 2006-06-13 |
| 5834786 | High current ribbon beam ion implanter | Nicholas R. White | 1998-11-10 |
| 5486080 | High speed movement of workpieces in vacuum processing | — | 1996-01-23 |
| 5350926 | Compact high current broad beam ion implanter | Nicholas R. White, Anthony Renau | 1994-09-27 |