Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431332 | High energy implanter with small footprint | Wilhelm Platow, Shu Satoh | 2025-09-30 |
| 12154763 | Hydraulic feed system for an ion source | Joshua Abeshaus, David Sporleder, Neil K. Colvin, Joseph Valinski, Michael Cristoforo +2 more | 2024-11-26 |
| 12112918 | Dual source injector with switchable analyzing magnet | Wilhelm Platow | 2024-10-08 |
| 12051561 | Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam | Neil K. Colvin, Edward Moore | 2024-07-30 |
| 11823858 | Dual source injector with switchable analyzing magnet | Wilhelm Platow | 2023-11-21 |
| 11798775 | Extended lifetime dual indirectly-heated cathode ion source | Wilhelm Platow, Jonathan David | 2023-10-24 |
| 11756772 | System and method for extending a lifetime of an ion source for molecular carbon implants | David Sporleder, Neil K. Colvin, Mike Ameen, Xiao Ping Xu | 2023-09-12 |
| 11728140 | Hydraulic feed system for an ion source | Joshua Abeshaus, David Sporleder, Neil K. Colvin, Joseph Valinski, Michael Cristoforo +2 more | 2023-08-15 |
| 11699563 | Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam | Neil K. Colvin, Xiao Ping Xu | 2023-07-11 |
| 11699565 | Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam | Neil K. Colvin, Edward Moore | 2023-07-11 |
| 11545330 | Ion source with multiple bias electrodes | Wilhelm Platow, Paul Silverstein, Marvin Farley, David Sporleder | 2023-01-03 |
| 11244800 | Stepped indirectly heated cathode with improved shielding | Wilhelm Platow, Shu Satoh, Paul Silverstein, Marvin Farley | 2022-02-08 |
| 11183365 | Multiple arc chamber source | Joshua Abeshaus, Camilla Lambert, Caleb Wisch, Kyle Hinds, Caleb B. Bell, III | 2021-11-23 |
| 11170967 | Liquid metal ion source | Neil K. Colvin, Tseh-Jen Hsieh, Michael S. Ameen | 2021-11-09 |
| 10720354 | System and method for aligning light-transmitting birefringent workpieces | — | 2020-07-21 |
| 10573485 | Tetrode extraction apparatus for ion source | Wilhelm Platow, Edward C. Eisner, Bo H. Vanderberg, Michael Cristoforo, Joshua Abeshaus | 2020-02-25 |
| 10347457 | Dynamic temperature control of an ion source | Alexander S. Perel, David Sporleder, Adam M. McLaughlin, Craig R. Chaney | 2019-07-09 |
| 10221476 | Coating insulating materials for improved life | Craig R. Chaney | 2019-03-05 |
| 9887060 | Ceramic ion source chamber | Craig R. Chaney | 2018-02-06 |
| 9773636 | Apparatus and method for generating high current negative hydrogen ion beam | W. Davis Lee, Anthony Renau | 2017-09-26 |
| 9741522 | Ceramic ion source chamber | Craig R. Chaney | 2017-08-22 |
| 9530615 | Techniques for improving the performance and extending the lifetime of an ion source | Peter F. Kurunczi, Wilhelm P. Platow | 2016-12-27 |
| 9396902 | Gallium ION source and materials therefore | Costel Biloiu, Craig R. Chaney, Benjamin Colombeau, Dennis Rodier | 2016-07-19 |
| 9287079 | Apparatus for dynamic temperature control of an ion source | Craig R. Chaney, William Davis Lee | 2016-03-15 |
| 9275820 | Gas coupled arc chamber cooling | William Davis Lee, Dennis Klesel | 2016-03-01 |