Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278124 | Model-based controlled load lock pumping scheme | D. Jeffrey Lischer, Bon-Woong Koo, Dawei Sun, Chi-Yang Cheng, Paul J. Murphy +4 more | 2025-04-15 |
| D1051838 | Single-slot tubular cathode | Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Alexander S. Perel +6 more | 2024-11-19 |
| 12106925 | Cyclotron having continuously variable energy output | Frank Sinclair, Klaus Becker, Joseph C. Olson, Morgan Patrick Dehnel, Anand Mathai George | 2024-10-01 |
| 11631567 | Ion source with single-slot tubular cathode | Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Alexander S. Perel +6 more | 2023-04-18 |
| 11562885 | Particle yield via beam-line pressure control | Thomas Stacy, Jay T. Scheuer, Eric D. Hermanson, Bon-Woong Koo | 2023-01-24 |
| 11276543 | Hydrogen generator for an ion implanter | Neil K. Colvin, Richard J. Rzeszut, Wendy Colby | 2022-03-15 |
| 11170967 | Liquid metal ion source | Neil J. Bassom, Neil K. Colvin, Michael S. Ameen | 2021-11-09 |
| 11127557 | Ion source with single-slot tubular cathode | Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Alexander S. Perel +6 more | 2021-09-21 |
| 11062873 | Hydrogen bleed gas for an ion source housing | Neil K. Colvin | 2021-07-13 |
| 10847339 | Hydrogen generator for an ion implanter | Neil K. Colvin, Richard J. Rzeszut, Wendy Colby | 2020-11-24 |
| 10676370 | Hydrogen co-gas when using aluminum iodide as an ion source material | Neil K. Colvin, Neil Basson | 2020-06-09 |
| 10535498 | Lanthanated tungsten ion source and beamline components | Neil K. Colvin, Paul Silverstein | 2020-01-14 |
| 10361069 | Ion source repeller shield comprising a labyrinth seal | Neil K. Colvin, Paul Silverstein | 2019-07-23 |
| 10361081 | Phosphine co-gas for carbon implants | Neil K. Colvin | 2019-07-23 |
| 10256069 | Phosphorous trifluoride co-gas for carbon implants | Neil K. Colvin | 2019-04-09 |
| 10170286 | In-situ cleaning using hydrogen peroxide as co-gas to primary dopant or purge gas for minimizing carbon deposits in an ion source | Neil K. Colvin | 2019-01-01 |
| 9984855 | Implementation of co-gases for germanium and boron ion implants | Neil K. Colvin | 2018-05-29 |
| 9978555 | Ion source liner having a lip for ion implantation systems | Neil K. Colvin | 2018-05-22 |
| 9941087 | Ion source cathode shield | Neil K. Colvin, Paul Silverstein | 2018-04-10 |
| 9870893 | Multi-piece electrode aperture | Neil K. Colvin, Paul Silverstein | 2018-01-16 |
| 9805912 | Hydrogen COGas for carbon implant | Neil K. Colvin | 2017-10-31 |
| 9543110 | Reduced trace metals contamination ion source for an ion implantation system | Neil K. Colvin | 2017-01-10 |
| 8779395 | Automatic control system for selection and optimization of co-gas flow levels | Neil K. Colvin | 2014-07-15 |
| 8524584 | Carbon implantation process and carbon ion precursor composition | William Davis Lee, Daniel R. Tieger | 2013-09-03 |