PS

Paul Silverstein

AT Axcelis Technologies: 7 patents #35 of 300Top 15%
Overall (All Time): #700,840 of 4,157,543Top 20%
7
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
11545330 Ion source with multiple bias electrodes Wilhelm Platow, Neil J. Bassom, Marvin Farley, David Sporleder 2023-01-03
11521821 Ion source repeller Steven T. Drummond, Neil K. Colvin 2022-12-06
11244800 Stepped indirectly heated cathode with improved shielding Wilhelm Platow, Neil J. Bassom, Shu Satoh, Marvin Farley 2022-02-08
10535498 Lanthanated tungsten ion source and beamline components Neil K. Colvin, Tseh-Jen Hsieh 2020-01-14
10361069 Ion source repeller shield comprising a labyrinth seal Neil K. Colvin, Tseh-Jen Hsieh 2019-07-23
9941087 Ion source cathode shield Neil K. Colvin, Tseh-Jen Hsieh 2018-04-10
9870893 Multi-piece electrode aperture Neil K. Colvin, Tseh-Jen Hsieh 2018-01-16