SD

Steven T. Drummond

AT Axcelis Technologies: 2 patents #105 of 300Top 35%
Overall (All Time): #1,724,241 of 4,157,543Top 45%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12354834 Method for setting gap between cathode and filament Joshua Abeshaus 2025-07-08
11521821 Ion source repeller Neil K. Colvin, Paul Silverstein 2022-12-06