Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9187832 | Extended lifetime ion source | Costel Biloiu, David Sporleder, Jay T. Scheuer | 2015-11-17 |
| 9142392 | Self-cleaning radio frequency plasma source | — | 2015-09-22 |
| 9134074 | Method and apparatus for thermal control of ion sources and sputtering targets | — | 2015-09-15 |
| 9018829 | Excited gas injection for ion implant control | Bon-Woong Koo, Victor M. Benveniste, Christopher A. Rowland, Craig R. Chaney, Frank Sinclair | 2015-04-28 |
| 8937003 | Technique for ion implanting a target | Alexander S. Perel, Craig R. Chaney, Wayne LeBlanc, Robert C. Lindberg, Antonella Cucchetti +2 more | 2015-01-20 |
| 8759788 | Ion source | — | 2014-06-24 |
| 8501624 | Excited gas injection for ion implant control | Bon-Woong Koo, Victor M. Benveniste, Christopher A. Rowland, Craig R. Chaney, Frank Sinclair | 2013-08-06 |
| 8455839 | Cleaning of an extraction aperture of an ion source | Craig R. Chaney, Alexander S. Perel, Leo V. Klos | 2013-06-04 |
| 8330127 | Flexible ion source | Russell J. Low, Jay T. Scheuer, Alexander S. Perel, Craig R. Chaney | 2012-12-11 |
| 8163641 | System for modifying small structures | George Y. Gu, Thomas J. Gannon, Kun Liu | 2012-04-24 |
| 8049192 | Apparatus and system for controlling ion ribbon beam uniformity in an ion implanter | Leo V. Klos, Joseph C. Olson | 2011-11-01 |
| 8022371 | Cathode having electron production and focusing grooves, ion source and related method | — | 2011-09-20 |
| 8003959 | Ion source cleaning end point detection | Wilhelm P. Platow, Peter F. Kurunczi, Alexander S. Perel, Craig R. Chaney | 2011-08-23 |
| 7723699 | Cathode having electron production and focusing grooves, ion source and related method | — | 2010-05-25 |
| 7674706 | System for modifying small structures using localized charge transfer mechanism to remove or deposit material | George Y. Gu, Thomas J. Gannon, Kun Liu | 2010-03-09 |
| 6863787 | Dummy copper deprocessing | Chuong T. Huynh | 2005-03-08 |
| 6838380 | Fabrication of high resistivity structures using focused ion beams | Tung Mai | 2005-01-04 |