Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756772 | System and method for extending a lifetime of an ion source for molecular carbon implants | David Sporleder, Neil J. Bassom, Neil K. Colvin, Xiao Ping Xu | 2023-09-12 |
| 10403503 | Wafer cooling system and method | Marvin Farley, Causon Ko-Chuan Jen | 2019-09-03 |
| 9978599 | Wafer cooling apparatus and method | Marvin Farley, Causon Ko-Chuan Jen | 2018-05-22 |