Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1076836 | Mainframe with integrated lid | Michael R. Rice, Robert M. McAndrew, Travis Morey, Adam J. Wyatt, Ofer Amir +2 more | 2025-05-27 |
| 11996307 | Semiconductor processing tool platform configuration with reduced footprint | Nir Merry, Schubert S. Chu, Sushant S. Koshti, Nyi O. Myo, Songjae Lee | 2024-05-28 |
| D1029066 | Mainframe of dual-robot substrate processing system | Michael R. Rice, Travis Morey, Adam J. Wyatt, Ofer Amir | 2024-05-28 |
| 11932950 | Organic contamination free surface machining | Yuanhong Guo, Sheng Guo, Marek Radko, Steven V. Sansoni, Nagendra Madiwal +7 more | 2024-03-19 |
| D992611 | Mainframe of substrate processing system | Michael R. Rice, Travis Morey, Adam J. Wyatt, Ofer Amir | 2023-07-18 |
| D991994 | Mainframe of substrate processing system | Michael R. Rice, Travis Morey, Adam J. Wyatt, Ofer Amir | 2023-07-11 |
| 11555250 | Organic contamination free surface machining | Yuanhong Guo, Sheng Guo, Marek Radko, Steven V. Sansoni, Nagendra Madiwal +7 more | 2023-01-17 |
| D973737 | Mainframe of substrate processing system | Michael R. Rice, Travis Morey, Adam J. Wyatt, Ofer Amir | 2022-12-27 |
| D973116 | Mainframe of substrate processing system | Michael R. Rice, Travis Morey, Adam J. Wyatt, Ofer Amir | 2022-12-20 |
| 11415230 | Slit valve pneumatic control | Paul Z. Wirth, Ofer Amir | 2022-08-16 |
| 11328943 | Dual gate and single actuator system | Kumaresan Kuppannan, Ofer Amir | 2022-05-10 |
| 11087998 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael R. Rice, Michael Meyers, John Mazzocco, Dean C. Hruzek, Sushant S. Koshti +2 more | 2021-08-10 |
| 10971381 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael R. Rice, Michael Meyers, John Mazzocco, Dean C. Hruzek, Sushant S. Koshti +2 more | 2021-04-06 |
| 10381247 | Gas systems and methods for chamber ports | Nagendra Madiwal, Robert Irwin Decottignies, Andrew Nguyen, Paul B. Reuter, Angela Rose Sico +2 more | 2019-08-13 |
| 10159169 | Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods | Joseph Vincent, Dean C. Hruzek, Vijayabaskar Soundarrajan, Pandu Maddherla, Adam J. Wyatt +1 more | 2018-12-18 |
| 9435025 | Gas apparatus, systems, and methods for chamber ports | Nagendra Madiwal, Robert Irwin Decottignies, Andrew Nguyen, Paul B. Reuter, Angela Rose Sico +2 more | 2016-09-06 |
| 9091491 | Cooling plates and semiconductor apparatus thereof | Helder Lee, Miriam Schwartz, Aaron P. Webb, Theodoss Costuros | 2015-07-28 |
| 8911193 | Substrate processing sequence in a cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2014-12-16 |
| 8066466 | Substrate processing sequence in a Cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2011-11-29 |
| 7798764 | Substrate processing sequence in a cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2010-09-21 |
| 7651306 | Cartesian robot cluster tool architecture | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2010-01-26 |
| 7374391 | Substrate gripper for a substrate handling robot | Michael R. Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2008-05-20 |
| 7374393 | Method of retaining a substrate during a substrate transferring process | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2008-05-20 |