| D1098220 |
Mainframe of dual-robot substrate processing system |
Michael R. Rice, Travis Morey, Adam J. Wyatt, Ofer Amir |
2025-10-14 |
|
| D1076836 |
Mainframe with integrated lid |
Michael R. Rice, Robert M. McAndrew, Travis Morey, Adam J. Wyatt, Ofer Amir +2 more |
2025-05-27 |
|
| 11996307 |
Semiconductor processing tool platform configuration with reduced footprint |
Nir Merry, Schubert S. Chu, Sushant S. Koshti, Nyi O. Myo, Songjae Lee |
2024-05-28 |
$67,076,000 |
| D1029066 |
Mainframe of dual-robot substrate processing system |
Michael R. Rice, Travis Morey, Adam J. Wyatt, Ofer Amir |
2024-05-28 |
|
| 11932950 |
Organic contamination free surface machining |
Yuanhong Guo, Sheng Guo, Marek Radko, Steven V. Sansoni, Nagendra Madiwal +7 more |
2024-03-19 |
$54,086,000 |
| D992611 |
Mainframe of substrate processing system |
Michael R. Rice, Travis Morey, Adam J. Wyatt, Ofer Amir |
2023-07-18 |
|
| D991994 |
Mainframe of substrate processing system |
Michael R. Rice, Travis Morey, Adam J. Wyatt, Ofer Amir |
2023-07-11 |
|
| 11555250 |
Organic contamination free surface machining |
Yuanhong Guo, Sheng Guo, Marek Radko, Steven V. Sansoni, Nagendra Madiwal +7 more |
2023-01-17 |
$39,427,000 |
| D973737 |
Mainframe of substrate processing system |
Michael R. Rice, Travis Morey, Adam J. Wyatt, Ofer Amir |
2022-12-27 |
|
| D973116 |
Mainframe of substrate processing system |
Michael R. Rice, Travis Morey, Adam J. Wyatt, Ofer Amir |
2022-12-20 |
|
| 11415230 |
Slit valve pneumatic control |
Paul Z. Wirth, Ofer Amir |
2022-08-16 |
$38,686,000 |
| 11328943 |
Dual gate and single actuator system |
Kumaresan Kuppannan, Ofer Amir |
2022-05-10 |
$45,778,000 |
| 11087998 |
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods |
Michael R. Rice, Michael Meyers, John Mazzocco, Dean C. Hruzek, Sushant S. Koshti +2 more |
2021-08-10 |
$94,755,000 |
| 10971381 |
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods |
Michael R. Rice, Michael Meyers, John Mazzocco, Dean C. Hruzek, Sushant S. Koshti +2 more |
2021-04-06 |
$63,491,000 |
| 10381247 |
Gas systems and methods for chamber ports |
Nagendra Madiwal, Robert Irwin Decottignies, Andrew Nguyen, Paul B. Reuter, Angela Rose Sico +2 more |
2019-08-13 |
$55,265,000 |
| 10159169 |
Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods |
Joseph Vincent, Dean C. Hruzek, Vijayabaskar Soundarrajan, Pandu Maddherla, Adam J. Wyatt +1 more |
2018-12-18 |
$31,665,000 |
| 9435025 |
Gas apparatus, systems, and methods for chamber ports |
Nagendra Madiwal, Robert Irwin Decottignies, Andrew Nguyen, Paul B. Reuter, Angela Rose Sico +2 more |
2016-09-06 |
$45,889,000 |
| 9091491 |
Cooling plates and semiconductor apparatus thereof |
Helder Lee, Miriam Schwartz, Aaron P. Webb, Theodoss Costuros |
2015-07-28 |
$13,399,000 |
| 8911193 |
Substrate processing sequence in a cartesian robot cluster tool |
Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more |
2014-12-16 |
$14,131,000 |
| 8066466 |
Substrate processing sequence in a Cartesian robot cluster tool |
Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more |
2011-11-29 |
$8,648,000 |
| 7798764 |
Substrate processing sequence in a cartesian robot cluster tool |
Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more |
2010-09-21 |
$8,059,000 |
| 7651306 |
Cartesian robot cluster tool architecture |
Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more |
2010-01-26 |
$9,867,000 |
| 7374391 |
Substrate gripper for a substrate handling robot |
Michael R. Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more |
2008-05-20 |
$13,768,000 |
| 7374393 |
Method of retaining a substrate during a substrate transferring process |
Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more |
2008-05-20 |
$13,768,000 |
