Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Slit valve pneumatic control

Slit valve pneumatic control

US Patent 11415230 · Granted Aug 16, 2022

Estimated economic value: $38,686,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods and apparatus for measuring temperature using centerfind systems2025
Modular mainframe layout for supporting multiple semiconductor process modules o2025
Mainframe of dual-robot substrate processing system2025
Mainframe of dual-robot substrate processing system2025
Mainframe with integrated lid2025
Mainframe with integrated lid2025
Methods and systems for temperature control for a substrate2025
Servo-control system2025
Methods and systems of optical inspection of electronic device manufacturing mac2025
Disturbance compensation for substrate processing recipes2024
Semiconductor processing tool platform configuration with reduced footprint2024
Mainframe of dual-robot substrate processing system2024