Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12325140 | Grip-based transport speeds for transporting objects at a manufacturing system | Khai Ngo, Michelle A. Wong | 2025-06-10 |
| 12165905 | Process kit enclosure system | Nicholas Michael Kopec, Leon Volfovski, Douglas R. McAllister, Andreas Schmid, Jeffrey C. Hudgens +2 more | 2024-12-10 |
| 12014944 | Mapping of a replacement parts storage container | Nicholas Michael Bergantz, Jeffrey C. Hudgens, Doug McAllister | 2024-06-18 |
| 11842917 | Process kit ring adaptor | Leon Volfovski, Andreas Schmid, Denis M. Koosau, Nicholas Michael Kopec, Steven E. Babayan +3 more | 2023-12-12 |
| 11469123 | Mapping of a replacement parts storage container | Nicholas Michael Bergantz, Jeffrey C. Hudgens, Doug McAllister | 2022-10-11 |
| 11450539 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Sangram Patil +3 more | 2022-09-20 |
| 11282724 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Sangram Patil +3 more | 2022-03-22 |
| 10964584 | Process kit ring adaptor | Leon Volfovski, Andreas Schmid, Denis M. Koosau, Nicholas Michael Kopec, Steven E. Babayan +3 more | 2021-03-30 |
| 10192765 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Sangram Patil +3 more | 2019-01-29 |
| 9423042 | Slit valve having increased flow uniformity | Chandrasekhar Balasubramanyam, Miriam Schwartz, Elizabeth Wu, Kedarnath Sangam | 2016-08-23 |
| 9091491 | Cooling plates and semiconductor apparatus thereof | Miriam Schwartz, Michael Kuchar, Aaron P. Webb, Theodoss Costuros | 2015-07-28 |
| 8377213 | Slit valve having increased flow uniformity | Chandrasekhar Balasubramanyam, Miriam Schwartz, Elizabeth Wu, Kedarnath Sangam | 2013-02-19 |