| 11450539 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls |
Sushant S. Koshti, Dean C. Hruzek, John C. Menk, Helder Lee, Sangram Patil +3 more |
2022-09-20 |
| 11337851 |
Devices, systems and methods for endovascular temperature control |
John William Jacobsen, Sean Yip, Jeremy Thomas Dabrowiak |
2022-05-24 |
| 11282724 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls |
Sushant S. Koshti, Dean C. Hruzek, John C. Menk, Helder Lee, Sangram Patil +3 more |
2022-03-22 |
| 11018036 |
Carrier adapter insert apparatus and carrier adapter insert detection methods |
John Mazzocco, Edward Ng, Douglas MacLeod, David Phillips, Jeffrey C. Hudgens |
2021-05-25 |
| 10199256 |
Methods and systems for improved mask processing |
Edward Ng, Jeffrey C. Hudgens, Sushant S. Koshti |
2019-02-05 |
| 10192765 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls |
Sushant S. Koshti, Dean C. Hruzek, John C. Menk, Helder Lee, Sangram Patil +3 more |
2019-01-29 |
| 10115616 |
Carrier adapter insert apparatus and carrier adapter insert detection methods |
John Mazzocco, Edward Ng, Douglas MacLeod, David Phillips, Jeffrey C. Hudgens |
2018-10-30 |
| 9441792 |
Transfer chamber gas purge apparatus, electronic device processing systems, and purge methods |
Edward Ng, Eric A. Englhardt, Travis Morey, Steve Hongkham |
2016-09-13 |
| 9202738 |
Pneumatic end effector apparatus and substrate transportation systems with annular flow channel |
Daniel Greenberg |
2015-12-01 |
| 8215834 |
Optical fiber based polymer core sensor |
Haiying Huang |
2012-07-10 |
