Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12074042 | High-density substrate processing systems and methods | Jason M. Schaller, Charles T. Carlson, Tuan Nguyen, Swaminathan Srinivasan, Khokan Chandra Paul | 2024-08-27 |
| 11574826 | High-density substrate processing systems and methods | Jason M. Schaller, Charles T. Carlson, Tuan Nguyen, Swaminathan Srinivasan, Khokan Chandra Paul | 2023-02-07 |
| 9524889 | Processing systems and apparatus adapted to process substrates in electronic device manufacturing | Paul B. Reuter, Eric A. Englhardt, Ganesh Balasubramanian, Xinglong Chen, JuanCarlos Rocha-Alvarez | 2016-12-20 |
| 9441792 | Transfer chamber gas purge apparatus, electronic device processing systems, and purge methods | Edward Ng, Eric A. Englhardt, Travis Morey, Ayan Majumdar | 2016-09-13 |
| 8019467 | Scheduling method for processing equipment | Eric A. Englhardt, Michael R. Rice, Helen R. Armer, Chongyang Wang | 2011-09-13 |
| 7819079 | Cartesian cluster tool configuration for lithography type processes | Eric A. Englhardt, Michael R. Rice, Jeffrey C. Hudgens, Jay D. Pinson, II, Mohsen Salek +3 more | 2010-10-26 |
| 7522968 | Scheduling method for processing equipment | Eric A. Englhardt, Michael R. Rice, Helen R. Armer, Chongyang Wang | 2009-04-21 |