Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9275334 | Increasing signal to noise ratio for creation of generalized and robust prediction models | Deepak Sharma, James Moyne | 2016-03-01 |
| 8550031 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2013-10-08 |
| 8215262 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2012-07-10 |
| 8181596 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2012-05-22 |
| 8146530 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2012-04-03 |
| 8019467 | Scheduling method for processing equipment | Steve Hongkham, Eric A. Englhardt, Michael R. Rice, Chongyang Wang | 2011-09-13 |
| 7925377 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2011-04-12 |
| 7819079 | Cartesian cluster tool configuration for lithography type processes | Eric A. Englhardt, Michael R. Rice, Jeffrey C. Hudgens, Steve Hongkham, Jay D. Pinson, II +3 more | 2010-10-26 |
| 7743728 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2010-06-29 |
| 7694647 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2010-04-13 |
| 7522968 | Scheduling method for processing equipment | Steve Hongkham, Eric A. Englhardt, Michael R. Rice, Chongyang Wang | 2009-04-21 |
| 7501354 | Formation of low K material utilizing process having readily cleaned by-products | Dustin W. Ho, Derek R. Witty, Hichem M'Saad | 2009-03-10 |
| 7357842 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2008-04-15 |
| 7082345 | Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities | Arulkumar Shanmugasundram, Alexander T. Schwarm | 2006-07-25 |
| 7049606 | Electron beam treatment apparatus | Alexandros T. Demos, Hari Ponnekanti, Jun Zhao | 2006-05-23 |
| 7018941 | Post treatment of low k dielectric films | Zhenjiang Cui, Josephine Chang, Alexandros T. Demos, Reza Arghavani, Derek R. Witty +2 more | 2006-03-28 |
| 6831284 | Large area source for uniform electron beam generation | Alexandros T. Demos, Hari Ponnekanti, Jun Zhao, William R. Livesay, Scott C. Woods | 2004-12-14 |