Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8550031 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2013-10-08 |
| 8215262 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2012-07-10 |
| 8181596 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2012-05-22 |
| 8146530 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2012-04-03 |
| 7925377 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2011-04-12 |
| 7743728 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2010-06-29 |
| 7694647 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2010-04-13 |
| 7431585 | Apparatus and method for heating substrates | Jun Zhao, David H. Quach, Timothy Weidman, Farhad Moghadam, Dan Maydan | 2008-10-07 |
| 7381052 | Apparatus and method for heating substrates | Jun Zhao, David H. Quach, Timothy Weidman, Farhad Moghadam, Dan Maydan | 2008-06-03 |
| 7357842 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II, Michael R. Rice +10 more | 2008-04-15 |
| 7256139 | Methods and apparatus for e-beam treatment used to fabricate integrated circuit devices | Farhad Moghadam, Jun Zhao, Timothy Weidman, Li Xia, Alexandros T. Demos | 2007-08-14 |
| 7166524 | Method for ion implanting insulator material to reduce dielectric constant | Amir Al-Bayati, Kenneth S. Collins, Ken MacWilliams, Hiroji Hanawa, Kartik Ramaswamy +2 more | 2007-01-23 |
| 6992024 | Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques | Zhenjiang Cui, Michael S. Cox, Jun Zhao | 2006-01-31 |
| 6936551 | Methods and apparatus for E-beam treatment used to fabricate integrated circuit devices | Farhad Moghadam, Jun Zhao, Timothy Weidman, Li-Qun Xia, Alexandros T. Demos | 2005-08-30 |
| 6895776 | Anti-stratification-solution delivery system for spin-on dielectrics | Jun Zhao | 2005-05-24 |
| 6878644 | Multistep cure technique for spin-on-glass films | Zhenjiang Cui, Michael S. Cox, Jun Zhao, Khaled A. Elsheref, Alexandros T. Demos | 2005-04-12 |
| 6693050 | Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques | Zhenjiang Cui, Michael S. Cox, Jun Zhao | 2004-02-17 |
| 6559071 | Process for producing dielectric thin films | Teresa Ramos, Douglas M. Smith, James Drage | 2003-05-06 |
| 6372666 | Process for producing dielectric thin films | Teresa Ramos, Douglas M. Smith, James Drage | 2002-04-16 |