Issued Patents All Time
Showing 25 most recent of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334376 | Substrate transfer systems and methods of use thereof | Alex Berger, Jeffrey C. Hudgens | 2025-06-17 |
| 11784074 | Substrate transfer systems and methods of use thereof | Alex Berger, Jeffrey C. Hudgens | 2023-10-10 |
| 11527424 | Substrate transfer systems and methods of use thereof | Alex Berger, Jeffrey C. Hudgens | 2022-12-13 |
| 11087998 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael R. Rice, Michael Meyers, John Mazzocco, Dean C. Hruzek, Michael Kuchar +2 more | 2021-08-10 |
| 10971381 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael R. Rice, Michael Meyers, John Mazzocco, Dean C. Hruzek, Michael Kuchar +2 more | 2021-04-06 |
| 10087543 | Seal rings in electrochemical processors | Nolan L. Zimmerman, George Mattinger, Gregory J. Wilson, Balamurugan Ramasamy | 2018-10-02 |
| 10010912 | Particle reduction via throttle gate valve purge | Jared Ahmad Lee, Dmitry Lubomirsky, Martin Jeff Salinas, Andrew Nguyen, Tom K. Cho +1 more | 2018-07-03 |
| 9524889 | Processing systems and apparatus adapted to process substrates in electronic device manufacturing | Steve Hongkham, Paul B. Reuter, Ganesh Balasubramanian, Xinglong Chen, JuanCarlos Rocha-Alvarez | 2016-12-20 |
| 9441792 | Transfer chamber gas purge apparatus, electronic device processing systems, and purge methods | Edward Ng, Travis Morey, Ayan Majumdar, Steve Hongkham | 2016-09-13 |
| 9177842 | Degassing apparatus adapted to process substrates in multiple tiers with second actuator | Richard Giljum, Jeffrey C. Hudgens, Igor Kogan, Michael R. Rice, Sushant S. Koshti | 2015-11-03 |
| 9147592 | Linked vacuum processing tools and methods of using the same | Steve Szudarski, Andrew Scott Cornelius, Amitabh Puri, Michael R. Rice, Jeffrey C. Hudgens +5 more | 2015-09-29 |
| 8911193 | Substrate processing sequence in a cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2014-12-16 |
| 8689812 | Methods and loadport for purging a substrate carrier | Vinay Shah, Jeffrey C. Hudgens, Martin R. Elliott | 2014-04-08 |
| 8601975 | Methods and loadport apparatus for purging a substrate carrier | Vinay Shah, Jeffrey C. Hudgens, Martin R. Elliott | 2013-12-10 |
| 8379082 | System, methods and apparatus for substrate carrier content verification using a material handling system | Vinay Shah, Sushant S. Koshti | 2013-02-19 |
| 8225496 | Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminated | Robert Z. Bachrach, Yong Kee Chae, Soo Young Choi, Nicholas G. J. de Vries, Yacov Elgar +22 more | 2012-07-24 |
| 8204617 | Methods and apparatus for enhanced operation of substrate carrier handlers | Michael Teferra, Amitabh Puri | 2012-06-19 |
| 8074597 | Methods and apparatus for purging a substrate carrier | Vinay Shah, Jeffrey C. Hudgens, Martin R. Elliott | 2011-12-13 |
| 8066466 | Substrate processing sequence in a Cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2011-11-29 |
| 8020689 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Robert B. Lowrance, Martin R. Elliot, Jeffrey C. Hudgens | 2011-09-20 |
| 8019467 | Scheduling method for processing equipment | Steve Hongkham, Michael R. Rice, Helen R. Armer, Chongyang Wang | 2011-09-13 |
| 7984543 | Methods for moving a substrate carrier | Martin R. Elliott, Vinay Shah, Jeffrey C. Hudgens | 2011-07-26 |
| 7930061 | Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback | Michael R. Rice, Jeffrey C. Hudgens, Kirk Van Katwyk | 2011-04-19 |
| 7912576 | Calibration of high speed loader to substrate transport system | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Kirk Van Katwyk +1 more | 2011-03-22 |
| 7894923 | Methods and apparatus for sensing substrates in carriers | Sushant S. Koshti, Vinay Shah | 2011-02-22 |