| 12334376 |
Substrate transfer systems and methods of use thereof |
Alex Berger, Jeffrey C. Hudgens |
2025-06-17 |
|
| 11784074 |
Substrate transfer systems and methods of use thereof |
Alex Berger, Jeffrey C. Hudgens |
2023-10-10 |
$39,034,000 |
| 11527424 |
Substrate transfer systems and methods of use thereof |
Alex Berger, Jeffrey C. Hudgens |
2022-12-13 |
$35,358,000 |
| 11087998 |
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods |
Michael R. Rice, Michael Meyers, John Mazzocco, Dean C. Hruzek, Michael Kuchar +2 more |
2021-08-10 |
$94,755,000 |
| 10971381 |
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods |
Michael R. Rice, Michael Meyers, John Mazzocco, Dean C. Hruzek, Michael Kuchar +2 more |
2021-04-06 |
$63,491,000 |
| 10087543 |
Seal rings in electrochemical processors |
Nolan L. Zimmerman, George Mattinger, Gregory J. Wilson, Balamurugan Ramasamy |
2018-10-02 |
$29,675,000 |
| 10010912 |
Particle reduction via throttle gate valve purge |
Jared Ahmad Lee, Dmitry Lubomirsky, Martin Jeff Salinas, Andrew Nguyen, Tom K. Cho +1 more |
2018-07-03 |
$29,604,000 |
| 9524889 |
Processing systems and apparatus adapted to process substrates in electronic device manufacturing |
Steve Hongkham, Paul B. Reuter, Ganesh Balasubramanian, Xinglong Chen, JuanCarlos Rocha-Alvarez |
2016-12-20 |
$108,070,000 |
| 9441792 |
Transfer chamber gas purge apparatus, electronic device processing systems, and purge methods |
Edward Ng, Travis Morey, Ayan Majumdar, Steve Hongkham |
2016-09-13 |
$19,510,000 |
| 9177842 |
Degassing apparatus adapted to process substrates in multiple tiers with second actuator |
Richard Giljum, Jeffrey C. Hudgens, Igor Kogan, Michael R. Rice, Sushant S. Koshti |
2015-11-03 |
$6,969,000 |
| 9147592 |
Linked vacuum processing tools and methods of using the same |
Steve Szudarski, Andrew Scott Cornelius, Amitabh Puri, Michael R. Rice, Jeffrey C. Hudgens +5 more |
2015-09-29 |
$14,922,000 |
| 8911193 |
Substrate processing sequence in a cartesian robot cluster tool |
Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more |
2014-12-16 |
$14,131,000 |
| 8689812 |
Methods and loadport for purging a substrate carrier |
Vinay Shah, Jeffrey C. Hudgens, Martin R. Elliott |
2014-04-08 |
$11,783,000 |
| 8601975 |
Methods and loadport apparatus for purging a substrate carrier |
Vinay Shah, Jeffrey C. Hudgens, Martin R. Elliott |
2013-12-10 |
$20,050,000 |
| 8379082 |
System, methods and apparatus for substrate carrier content verification using a material handling system |
Vinay Shah, Sushant S. Koshti |
2013-02-19 |
$12,220,000 |
| 8225496 |
Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminated |
Robert Z. Bachrach, Yong Kee Chae, Soo Young Choi, Nicholas G. J. de Vries, Yacov Elgar +22 more |
2012-07-24 |
$7,359,000 |
| 8204617 |
Methods and apparatus for enhanced operation of substrate carrier handlers |
Michael Teferra, Amitabh Puri |
2012-06-19 |
$14,750,000 |
| 8074597 |
Methods and apparatus for purging a substrate carrier |
Vinay Shah, Jeffrey C. Hudgens, Martin R. Elliott |
2011-12-13 |
$5,494,000 |
| 8066466 |
Substrate processing sequence in a Cartesian robot cluster tool |
Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more |
2011-11-29 |
$8,648,000 |
| 8020689 |
Break-away positioning conveyor mount for accommodating conveyor belt bends |
Michael R. Rice, Robert B. Lowrance, Martin R. Elliot, Jeffrey C. Hudgens |
2011-09-20 |
$5,642,000 |
| 8019467 |
Scheduling method for processing equipment |
Steve Hongkham, Michael R. Rice, Helen R. Armer, Chongyang Wang |
2011-09-13 |
$7,377,000 |
| 7984543 |
Methods for moving a substrate carrier |
Martin R. Elliott, Vinay Shah, Jeffrey C. Hudgens |
2011-07-26 |
$10,864,000 |
| 7930061 |
Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback |
Michael R. Rice, Jeffrey C. Hudgens, Kirk Van Katwyk |
2011-04-19 |
$9,957,000 |
| 7912576 |
Calibration of high speed loader to substrate transport system |
Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Kirk Van Katwyk +1 more |
2011-03-22 |
$5,133,000 |
| 7894923 |
Methods and apparatus for sensing substrates in carriers |
Sushant S. Koshti, Vinay Shah |
2011-02-22 |
|
