Issued Patents All Time
Showing 26–50 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7857570 | Method and apparatus for supplying substrates to a processing tool | Martin R. Elliott, Michael R. Rice, Robert B. Lowrance, Jeffrey C. Hudgens | 2010-12-28 |
| 7819079 | Cartesian cluster tool configuration for lithography type processes | Michael R. Rice, Jeffrey C. Hudgens, Steve Hongkham, Jay D. Pinson, II, Mohsen Salek +3 more | 2010-10-26 |
| 7798764 | Substrate processing sequence in a cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2010-09-21 |
| 7798309 | Stabilizing substrate carriers during overhead transport | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens | 2010-09-21 |
| 7792608 | Substrate carrier handler that unloads substrate carriers directly from a moving conveyor | Michael R. Rice, Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens | 2010-09-07 |
| 7778721 | Small lot size lithography bays | Vinay Shah | 2010-08-17 |
| 7720557 | Methods and apparatus for enhanced operation of substrate carrier handlers | Michael Teferra, Amitabh Puri | 2010-05-18 |
| 7711445 | Systems and methods for transferring small lot size substrate carriers between processing tools | Michael R. Rice, Vinay Shah, Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens | 2010-05-04 |
| 7684895 | Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens | 2010-03-23 |
| 7673735 | System for transporting substrate carriers | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens | 2010-03-09 |
| 7651306 | Cartesian robot cluster tool architecture | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2010-01-26 |
| 7611319 | Methods and apparatus for identifying small lot size substrate carriers | Vinay Shah, Martin R. Elliott, Jeffrey C. Hudgens | 2009-11-03 |
| 7611318 | Overhead transfer flange and support for suspending a substrate carrier | Michael R. Rice, Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens | 2009-11-03 |
| 7603195 | Methods and apparatus for integrating large and small lot electronic device fabrication facilities | Amitabh Puri, David Duffin | 2009-10-13 |
| 7597183 | Kinematic pin with shear member and substrate carrier for use therewith | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens | 2009-10-06 |
| 7594789 | Overhead transfer flange and support for suspending a substrate carrier | Michael R. Rice, Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens | 2009-09-29 |
| 7578647 | Load port configurations for small lot size substrate carriers | Martin R. Elliott, Michael R. Rice, Jeffrey C. Hudgens, Victor Belitsky | 2009-08-25 |
| 7577487 | Methods and apparatus for a band to band transfer module | Robert B. Lowrance, Michael R. Rice, Vinay Shah, Sushant S. Koshti, Jeffrey C. Hudgens | 2009-08-18 |
| 7552816 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens | 2009-06-30 |
| 7540371 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens | 2009-06-02 |
| 7537108 | Methods and apparatus for transporting substrate carriers | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens | 2009-05-26 |
| 7527141 | System for transporting substrate carriers | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens | 2009-05-05 |
| 7522968 | Scheduling method for processing equipment | Steve Hongkham, Michael R. Rice, Helen R. Armer, Chongyang Wang | 2009-04-21 |
| 7506752 | Methods and apparatus for transporting substrate carriers | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens | 2009-03-24 |
| 7506747 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens | 2009-03-24 |