Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12074045 | Prevention of contamination of substrates during gas purging | Douglas B. Baumgarten, Russell Kaplan, Paul B. Reuter | 2024-08-27 |
| 11848220 | RFID part authentication and tracking of processing components | Earl Hunter, Russell Duke, Steven Mark Reedy | 2023-12-19 |
| 11810805 | Prevention of contamination of substrates during gas purging | Douglas B. Baumgarten, Russell Kaplan, Paul B. Reuter | 2023-11-07 |
| 11188926 | Unique part authentication | Earl Hunter, David Ganon, Gerard Crean | 2021-11-30 |
| 10930535 | RFID part authentication and tracking of processing components | Earl Hunter, Russell Duke, Steven Mark Reedy | 2021-02-23 |
| 10452111 | Enhanced re-hosting capability for legacy hardware and software | Ronald Vern Schauer, Mark Roger Covington, Suresh Kumaraswami | 2019-10-22 |
| 10037064 | Enhanced re-hosting capability for legacy hardware and software | Ronald Vern Schauer, Mark Roger Covington, Suresh Kumaraswami | 2018-07-31 |
| 9383739 | Enhanced re-hosting capability for legacy hardware and software | Ronald Vern Schauer, Mark Roger Covington, Suresh Kumaraswami | 2016-07-05 |
| 9147592 | Linked vacuum processing tools and methods of using the same | Eric A. Englhardt, Steve Szudarski, Andrew Scott Cornelius, Michael R. Rice, Jeffrey C. Hudgens +5 more | 2015-09-29 |
| 8204617 | Methods and apparatus for enhanced operation of substrate carrier handlers | Michael Teferra, Eric A. Englhardt | 2012-06-19 |
| 8024065 | Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility | Todd James Brill, Michael Teferra, Daniel R. Jessop, Glade L. Warner, David Duffin | 2011-09-20 |
| 7720557 | Methods and apparatus for enhanced operation of substrate carrier handlers | Michael Teferra, Eric A. Englhardt | 2010-05-18 |
| 7603195 | Methods and apparatus for integrating large and small lot electronic device fabrication facilities | David Duffin, Eric A. Englhardt | 2009-10-13 |
| 7603196 | Methods and apparatus for material control system interface | David Duffin, Daniel R. Jessop, Michael Teferra, Glade L. Warner | 2009-10-13 |
| 7522969 | Methods and apparatus for material control system interface | David Duffin, Daniel R. Jessop, Michael Teferra, Glade L. Warner | 2009-04-21 |
| 7434676 | Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility | Todd James Brill, Michael Teferra, Daniel R. Jessop, Glade L. Warner, David Duffin | 2008-10-14 |
| 7413069 | Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility | Todd James Brill, Michael Teferra, Daniel R. Jessop, Glade L. Warner, David Duffin | 2008-08-19 |
| 7274971 | Methods and apparatus for electronic device manufacturing system monitoring and control | Todd James Brill, Michael Teferra, Jeffrey C. Hudgens | 2007-09-25 |
| 7230702 | Monitoring of smart pin transition timing | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens +1 more | 2007-06-12 |
| 7218983 | Method and apparatus for integrating large and small lot electronic device fabrication facilities | David Duffin, Eric A. Englhardt | 2007-05-15 |
| 7177716 | Methods and apparatus for material control system interface | David Duffin, Daniel R. Jessop, Michael Teferra, Glade L. Warner | 2007-02-13 |
| 4978841 | Automatic leveling system and a method of leveling a workpiece based on focus detection | William A. Barrett | 1990-12-18 |