Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12215966 | Methods and systems of optical inspection of electronic device manufacturing machines | Mohsin Waqar, Paul Z. Wirth, Paul Fisher, Ilias Iliopoulos, Charles G. Potter | 2025-02-04 |
| 11813757 | Centerfinding for a process kit or process kit carrier at a manufacturing system | Ali Utku Pehlivan, Mohsin Waqar, Paul Z. Wirth | 2023-11-14 |
| 8024065 | Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility | Michael Teferra, Amitabh Puri, Daniel R. Jessop, Glade L. Warner, David Duffin | 2011-09-20 |
| 7434676 | Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility | Michael Teferra, Amitabh Puri, Daniel R. Jessop, Glade L. Warner, David Duffin | 2008-10-14 |
| 7413069 | Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility | Michael Teferra, Amitabh Puri, Daniel R. Jessop, Glade L. Warner, David Duffin | 2008-08-19 |
| 7274971 | Methods and apparatus for electronic device manufacturing system monitoring and control | Michael Teferra, Jeffrey C. Hudgens, Amitabh Puri | 2007-09-25 |