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Substrate processing sequence in a Cartesian robot cluster tool |
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Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback |
Michael R. Rice, Eric A. Englhardt, Jeffrey C. Hudgens |
2011-04-19 |
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Calibration of high speed loader to substrate transport system |
Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens +1 more |
2011-03-22 |
| 7798764 |
Substrate processing sequence in a cartesian robot cluster tool |
Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more |
2010-09-21 |
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Calibration of high speed loader to substrate transport system |
Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens +1 more |
2008-10-07 |
| 7374393 |
Method of retaining a substrate during a substrate transferring process |
Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more |
2008-05-20 |
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Monitoring of smart pin transition timing |
Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens +1 more |
2007-06-12 |
