| 12334376 |
Substrate transfer systems and methods of use thereof |
Jeffrey C. Hudgens, Eric A. Englhardt |
2025-06-17 |
| 11784074 |
Substrate transfer systems and methods of use thereof |
Jeffrey C. Hudgens, Eric A. Englhardt |
2023-10-10 |
| 11527424 |
Substrate transfer systems and methods of use thereof |
Jeffrey C. Hudgens, Eric A. Englhardt |
2022-12-13 |
| 11519351 |
Method for operating an internal combustion engine having an exhaust-gas catalytic converter |
— |
2022-12-06 |
| 6667242 |
Brim and gas escape for non-contact wafer holder |
Oleg Siniaguine, Sergey Savastiouk |
2003-12-23 |
| 6448188 |
Method of preventing motion of article in an article holder |
Oleg Siniaguine |
2002-09-10 |
| 6402843 |
Non-contact workpiece holder |
Oleg Siniaguine, Sergey Savastiouk, Igor Bagriy |
2002-06-11 |
| 6398823 |
Dynamic break for non-contact wafer holder |
Oleg Siniaguine |
2002-06-04 |
| 6203661 |
Brim and gas escape for non-contact wafer holder |
Oleg Siniaguine, Sergey Savastiouk |
2001-03-20 |
