Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9177842 | Degassing apparatus adapted to process substrates in multiple tiers with second actuator | Eric A. Englhardt, Richard Giljum, Jeffrey C. Hudgens, Michael R. Rice, Sushant S. Koshti | 2015-11-03 |
| 6929774 | Method and apparatus for heating and cooling substrates | Ratson Morad, Ho Seon Shin, Robin Cheung | 2005-08-16 |
| 6658763 | Method for heating and cooling substrates | Ratson Morad, Ho Seon Shin, Robin Cheung | 2003-12-09 |
| 6477787 | Method and apparatus for heating and cooling substrates | Ratson Morad, Ho Seon Shin, Robin Cheung | 2002-11-12 |
| 6357143 | Method and apparatus for heating and cooling substrates | Ratson Morad, Ho Seon Shin, Robin Cheung | 2002-03-19 |
| 6276072 | Method and apparatus for heating and cooling substrates | Ratson Morad, Ho Seon Shin, Robin Cheung | 2001-08-21 |
| 5885428 | Method and apparatus for both mechanically and electrostatically clamping a wafer to a pedestal within a semiconductor wafer processing system | — | 1999-03-23 |
| 5868847 | Clamp ring for shielding a substrate during film layer deposition | Aihua Chen, Zheng Xu, Howard Grunes, Avi Tepman | 1999-02-09 |
| 5810931 | High aspect ratio clamp ring | Joe Stevens, Howard Grunes | 1998-09-22 |