Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599402 | Electro-chemical deposition cell for face-up processing of single semiconductor substrates | Yezdi Dordi, Roy Edwards, Bob Lowrance, Michael Sugarman, Mark Denome | 2003-07-29 |
| 6516815 | Edge bead removal/spin rinse dry (EBR/SRD) module | Donald Olgado, Alex Ko, Yeuk-Fai Edwin Mok | 2003-02-11 |
| 6475357 | Inflatable compliant bladder assembly | Jayant Lakshmikanthan | 2002-11-05 |
| 6416647 | Electro-chemical deposition cell for face-up processing of single semiconductor substrates | Yezdi Dordi, Roy Edwards, Bob Lowrance, Michael Sugarman, Mark Denome | 2002-07-09 |
| 6267853 | Electro-chemical deposition system | Yezdi Dordi, Muhammad Malik, Henan Hao, Timothy Franklin, Donald Olgado | 2001-07-31 |
| 6251236 | Cathode contact ring for electrochemical deposition | — | 2001-06-26 |
| 6228233 | Inflatable compliant bladder assembly | Jayant Lakshmikanthan | 2001-05-08 |
| 5993170 | Apparatus and method for compressing high purity gas | Allen Russell Thompson, Norman Cowan, David Alvarez | 1999-11-30 |
| 5990453 | High pressure/high temperature process chamber | Ashok Das, Erich Tzou, Matt Cheng-Hsiung Tsai | 1999-11-23 |
| 5810931 | High aspect ratio clamp ring | Howard Grunes, Igor Kogan | 1998-09-22 |