| 6599402 |
Electro-chemical deposition cell for face-up processing of single semiconductor substrates |
Yezdi Dordi, Roy Edwards, Bob Lowrance, Michael Sugarman, Mark Denome |
2003-07-29 |
| 6516815 |
Edge bead removal/spin rinse dry (EBR/SRD) module |
Donald Olgado, Alex Ko, Yeuk-Fai Edwin Mok |
2003-02-11 |
| 6475357 |
Inflatable compliant bladder assembly |
Jayant Lakshmikanthan |
2002-11-05 |
| 6416647 |
Electro-chemical deposition cell for face-up processing of single semiconductor substrates |
Yezdi Dordi, Roy Edwards, Bob Lowrance, Michael Sugarman, Mark Denome |
2002-07-09 |
| 6267853 |
Electro-chemical deposition system |
Yezdi Dordi, Muhammad Malik, Henan Hao, Timothy Franklin, Donald Olgado |
2001-07-31 |
| 6251236 |
Cathode contact ring for electrochemical deposition |
— |
2001-06-26 |
| 6228233 |
Inflatable compliant bladder assembly |
Jayant Lakshmikanthan |
2001-05-08 |
| 5993170 |
Apparatus and method for compressing high purity gas |
Allen Russell Thompson, Norman Cowan, David Alvarez |
1999-11-30 |
| 5990453 |
High pressure/high temperature process chamber |
Ashok Das, Erich Tzou, Matt Cheng-Hsiung Tsai |
1999-11-23 |
| 5810931 |
High aspect ratio clamp ring |
Howard Grunes, Igor Kogan |
1998-09-22 |
