Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589407 | Aluminum deposition shield | Anantha K. Subramani, Leif DeLaurentis, Michael Rosenstein | 2003-07-08 |
| 6190037 | Non-intrusive, on-the-fly (OTF) temperature measurement and monitoring system | Nety M. Krishna, Marc Schweitzer, Nalin Patadia, Wei Yang, Umesh M. Kelkar +3 more | 2001-02-20 |
| 5990453 | High pressure/high temperature process chamber | Joe Stevens, Erich Tzou, Matt Cheng-Hsiung Tsai | 1999-11-23 |