Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9552968 | Plasma cleaning apparatus and method | Martin Deehan, Nan Lu, David T. Or, Mei Chang | 2017-01-24 |
| 9064911 | Heated cooling plate for E-chucks and pedestals | Shambhu N. Roy | 2015-06-23 |
| 8721796 | Plasma cleaning apparatus and method | Martin Deehan, Nan Lu, David T. Or, Mei Chang | 2014-05-13 |
| 5990453 | High pressure/high temperature process chamber | Ashok Das, Joe Stevens, Erich Tzou | 1999-11-23 |