Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6315878 | Substrate support and lift apparatus and method | Charles T. Carlson | 2001-11-13 |
| 6190037 | Non-intrusive, on-the-fly (OTF) temperature measurement and monitoring system | Ashok Das, Nety M. Krishna, Marc Schweitzer, Wei Yang, Umesh M. Kelkar +3 more | 2001-02-20 |
| 6146504 | Substrate support and lift apparatus and method | Charles T. Carlson | 2000-11-14 |
| 6030513 | Full face mask for capacitance-voltage measurements | Nayana Ghantiwala | 2000-02-29 |