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Guardbands in substrate processing systems |
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Value-independent situation identification and matching |
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Automatic and adaptive fault detection and classification limits |
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2023-03-21 |
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Jimmy Iskandar, Jianping Zou, Parris Hawkins |
2021-09-21 |
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Methods and systems for applying run-to-run control and virtual metrology to reduce equipment recovery time |
Jimmy Iskandar, Jianping Zou, Parris Hawkins |
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2021-01-05 |
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Method and apparatus for determining when to perform or trigger events in semi-conductor processing equipment |
— |
2020-04-14 |
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Methods and apparatuses for utilizing adaptive predictive algorithms and determining when to use the adaptive predictive algorithms for virtual metrology |
— |
2019-09-10 |
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Portable, adaptable equipment health user interface |
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2018-08-07 |
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Methods and apparatuses for utilizing adaptive predictive algorithms and determining when to use the adaptive predictive algorithms for virtual metrology |
— |
2018-02-06 |
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2017-03-28 |
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Method and apparatus for optimizing profit in predictive systems |
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2017-02-28 |
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Increasing signal to noise ratio for creation of generalized and robust prediction models |
Deepak Sharma, Helen R. Armer |
2016-03-01 |
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Methods and apparatuses for utilizing adaptive predictive algorithms and determining when to use the adaptive predictive algorithms for virtual metrology |
— |
2015-04-07 |
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Yield prediction feedback for controlling an equipment engineering system |
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2014-07-08 |
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Method and apparatus for developing, improving and verifying virtual metrology models in a manufacturing system |
— |
2013-12-31 |
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Yield prediction feedback for controlling an equipment engineering system |
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2013-12-17 |
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Dynamically updated predictive model |
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Generic cell controlling method and apparatus for computer integrated manufacturing system |
— |
1995-11-21 |