Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12020907 | Faceplate with localized flow control | Arun Thottappayil, Mayur Govind Kulkarni, Junghoon Sun, Hang Yu | 2024-06-25 |
| 10858735 | Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods | Danny D. WANG, Jason Michael Lamb, Rupankar Choudhury, Zhong Qiang Hua, Juan Carlos Rocha-Alvarez | 2020-12-08 |
| 10435786 | Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods | Danny D. WANG, Rupankar Choudhury, Zhong Qiang Hua, Juan Carlos Rocha-Alvarez, Jason Michael Lamb | 2019-10-08 |
| 7390757 | Methods for improving low k FSG film gap-fill characteristics | Seong-Oh Woo | 2008-06-24 |