| 12424414 |
Semiconductor processing system with a manifold for equal splitting and common divert architecture |
Arun Chakravarthy Chakravarthy, Dharma Ratnam Srichurnam, Hossein Rezvantalab |
2025-09-23 |
|
| 12400843 |
Chamber configurations and processes for particle control |
Fei Wu, Abdul Aziz Khaja, Sungwon Ha, Ganesh Balasubramanian |
2025-08-26 |
|
| 12266550 |
Multiple process semiconductor processing system |
Nitin Pathak, Badri Narayan Ramamurthi, Viren Kalsekar, Juan Carlos Rocha-Alvarez |
2025-04-01 |
|
| 12211728 |
Electrostatic chuck design with improved chucking and arcing performance |
Abdul Aziz Khaja, Venkata Sharat Chandra Parimi, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha |
2025-01-28 |
|
| 12191115 |
Dual RF for controllable film deposition |
Venkata Sharat Chandra Parimi, Xiaoquan Min, Zheng John Ye, Prashant Kumar Kulshreshtha, Lu Xu +1 more |
2025-01-07 |
|
| 12136549 |
Plasma-enhanced chemical vapor deposition of carbon hard-mask |
Byung Seok KWON, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Bushra Afzal, Sungwon Ha +3 more |
2024-11-05 |
$79,202,000 |
| 12000048 |
Pedestal for substrate processing chambers |
Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Sungwon Ha +1 more |
2024-06-04 |
$68,807,000 |
| 11984305 |
Substrate pedestal for improved substrate processing |
Viren Kalsekar, Venkata Sharat Chandra Parimi |
2024-05-14 |
$61,768,000 |
| 11875969 |
Process chamber with reduced plasma arc |
Fei Wu, Abdul Aziz Khaja, Sungwon Ha, Ganesh Balasubramanian |
2024-01-16 |
$94,012,000 |
| 11830706 |
Heated pedestal design for improved heat transfer and temperature uniformity |
Venkata Sharat Chandra Parimi, Zubin Huang, Jian Li, Satish Radhakrishnan, Rui Cheng +7 more |
2023-11-28 |
$39,424,000 |
| 11682574 |
Electrostatic chuck design with improved chucking and arcing performance |
Abdul Aziz Khaja, Venkata Sharat Chandra Parimi, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha |
2023-06-20 |
$48,645,000 |
| 11670492 |
Chamber configurations and processes for particle control |
Fei Wu, Abdul Aziz Khaja, Sungwon Ha, Ganesh Balasubramanian |
2023-06-06 |
$40,761,000 |
| 11600470 |
Targeted heat control systems |
Venkata Sharat Chandra Parimi, Satish Radhakrishnan, Xiaoquan Min, Sarah Michelle Bobek, Sungwon Ha +1 more |
2023-03-07 |
$32,704,000 |
| 11584994 |
Pedestal for substrate processing chambers |
Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Sungwon Ha +1 more |
2023-02-21 |
$24,540,000 |
| 11587773 |
Substrate pedestal for improved substrate processing |
Viren Kalsekar, Venkata Sharat Chandra Parimi |
2023-02-21 |
$24,540,000 |
| 11569072 |
RF grounding configuration for pedestals |
Satya THOKACHICHU, Edward P. Hammond, IV, Viren Kalsekar, Zheng John Ye, Abdul Aziz Khaja |
2023-01-31 |
$29,381,000 |
| 11560623 |
Methods of reducing chamber residues |
Liangfa Hu, Prashant Kumar Kulshreshtha, Anjana M. Patel, Abdul Aziz Khaja, Viren Kalsekar +5 more |
2023-01-24 |
$45,726,000 |
| 11532463 |
Semiconductor processing chamber and methods for cleaning the same |
Vishwas Kumar Pandey, Bushra Afzal, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez |
2022-12-20 |
$39,023,000 |
| 11515129 |
Radiation shield modification for improving substrate temperature uniformity |
Elizabeth Neville, Satish Radhakrishnan, Kartik Shah, Venkata Sharat Chandra Parimi, Sungwon Ha |
2022-11-29 |
$23,914,000 |
| 11515176 |
Thermally controlled lid stack components |
Siva Chandrasekar, Satish Radhakrishnan, Rajath Kumar Lakkenahalli Hiriyannaiah, Viren Kalsekar |
2022-11-29 |
$23,914,000 |
| 10923334 |
Selective deposition of hardmask |
Satya THOKACHICHU, Edward P. Hammond, IV, Viren Kalsekar, Zheng John Ye, Sarah Michelle Bobek +4 more |
2021-02-16 |
$36,444,000 |
| 10629427 |
Bevel etch profile control |
Zonghui SU, Abdul Aziz Khaja, Jeongmin Lee |
2020-04-21 |
$32,079,000 |
| 10599043 |
Critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware components |
Hiroyuki Ogiso, Jianhua Zhou, Zonghui SU, Juan Carlos Rocha-Alvarez, Jeongmin Lee +4 more |
2020-03-24 |
$19,108,000 |
| 10446430 |
Patterned chuck for substrate processing |
Terry Bluck, Babak Adibi, William Eugene Runstadler, Jr. |
2019-10-15 |
|
| 10276364 |
Bevel etch profile control |
Zonghui SU, Abdul Aziz Khaja, Jeongmin Lee |
2019-04-30 |
$23,214,000 |
