Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9875922 | Substrate processing system and method | Terry Pederson, Henry Hieslmair, Moon Chun, Babak Adibi, Terry Bluck | 2018-01-23 |
| 9583661 | Grid for plasma ion implant | Babak Adibi | 2017-02-28 |
| 9543114 | Implant masking and alignment system with rollers | Babak Adibi, Terry Bluck | 2017-01-10 |
| 9324598 | Substrate processing system and method | Terry Pederson, Henry Hieslmair, Moon Chun, Babak Adibi, Terry Bluck | 2016-04-26 |
| 9318332 | Grid for plasma ion implant | Babak Adibi | 2016-04-19 |
| 8172992 | Wafer electroplating apparatus for reducing edge defects | Bryan L. Buckalew, Kousik Ganesan, Shantinath Ghongadi, Zhian He, Steven T. Mayer +4 more | 2012-05-08 |