Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10745817 | Configuration and method of operation of an electrodeposition system for improved process stability and performance | Tighe A. Spurlin, Jonathan D. Reid, Shantinath Ghongadi, Andrew John McKerrow, James E. Duncan | 2020-08-18 |
| 10658281 | Integrated circuit substrate and method of making | Rahul N. Manepalli, Marcel Wall, Srinivas V. Pietambaram | 2020-05-19 |
| 9816193 | Configuration and method of operation of an electrodeposition system for improved process stability and performance | Tighe A. Spurlin, Jonathan D. Reid, Shantinath Ghongadi, Andrew John McKerrow, James E. Duncan | 2017-11-14 |
| 9685353 | Apparatus and method for edge bevel removal of copper from silicon wafers | Shantinath Ghongadi, Tariq Majid, Aaron Louis LaBrie, Steven T. Mayer | 2017-06-20 |
| 9138784 | Deionized water conditioning system and methods | Jeffrey A. Hawkins, Charles Merrill, Jason Daniel Marchetti, Bryan L. Buckalew | 2015-09-22 |
| 8540857 | Plating method and apparatus with multiple internally irrigated chambers | Steven T. Mayer, Shantinath Ghongadi, Zhian He, Jingbin Feng | 2013-09-24 |
| 8419964 | Apparatus and method for edge bevel removal of copper from silicon wafers | Shanthinath Ghongadi, Tariq Majid, Aaron Louis LaBrie, Steven T. Mayer | 2013-04-16 |
| 8398831 | Rapidly cleanable electroplating cup seal | Shantinath Ghongadi, Robert Rash, Jeff Hawkins, Seshasayee Varadarajan, Tariq Majid +2 more | 2013-03-19 |
| 8377268 | Electroplating cup assembly | Robert Rash, Shantinath Ghongadi, Zhian He, Tariq Majid, Jeff Hawkins +2 more | 2013-02-19 |
| 8262871 | Plating method and apparatus with multiple internally irrigated chambers | Steven T. Mayer, Shantinath Ghongadi, Zhian He, Jingbin Feng | 2012-09-11 |
| 8172992 | Wafer electroplating apparatus for reducing edge defects | Vinay Prabhakar, Bryan L. Buckalew, Shantinath Ghongadi, Zhian He, Steven T. Mayer +4 more | 2012-05-08 |
| 8172646 | Magnetically actuated chuck for edge bevel removal | Jingbin Feng, Aaron Louis LaBrie | 2012-05-08 |
| 7985325 | Closed contact electroplating cup assembly | Robert Rash, Shantinath Ghongadi, Zhian He, Tariq Majid, Jeff Hawkins +2 more | 2011-07-26 |
| 7935231 | Rapidly cleanable electroplating cup assembly | Shantinath Ghongadi, Robert Rash, Jeff Hawkins, Seshasayee Varadarajan, Tariq Majid +2 more | 2011-05-03 |