| 11255013 |
Ion implantation for modification of thin film coatings on glass |
Terry Bluck |
2022-02-22 |
| 10854772 |
Multi-piece substrate holder and alignment mechanism |
Hoang Huy Vu, Terry Bluck |
2020-12-01 |
| 10636935 |
Ion implant system having grid assembly |
Moon Chun |
2020-04-28 |
| 10559710 |
System of height and alignment rollers for precise alignment of wafers for ion implantation |
William Eugene Runstadler, Jr., Terry Bluck |
2020-02-11 |
| 10446430 |
Patterned chuck for substrate processing |
Terry Bluck, Vinay Prabhakar, William Eugene Runstadler, Jr. |
2019-10-15 |
| 9875922 |
Substrate processing system and method |
Terry Pederson, Henry Hieslmair, Moon Chun, Vinay Prabhakar, Terry Bluck |
2018-01-23 |
| 9850570 |
Ion implantation for modification of thin film coatings on glass |
Terry Bluck |
2017-12-26 |
| 9741894 |
Ion implant system having grid assembly |
Moon Chun |
2017-08-22 |
| 9583661 |
Grid for plasma ion implant |
Vinay Prabhakar |
2017-02-28 |
| 9543114 |
Implant masking and alignment system with rollers |
Vinay Prabhakar, Terry Bluck |
2017-01-10 |
| 9324598 |
Substrate processing system and method |
Terry Pederson, Henry Hieslmair, Moon Chun, Vinay Prabhakar, Terry Bluck |
2016-04-26 |
| 9318332 |
Grid for plasma ion implant |
Vinay Prabhakar |
2016-04-19 |
| 9303314 |
Ion implant system having grid assembly |
Moon Chun |
2016-04-05 |
| 8997688 |
Ion implant system having grid assembly |
Moon Chun |
2015-04-07 |
| 8871619 |
Application specific implant system and method for use in solar cell fabrications |
Edward S. Murrer |
2014-10-28 |
| 8749053 |
Plasma grid implant system for use in solar cell fabrications |
Moon Chun |
2014-06-10 |
| 8697552 |
Method for ion implant using grid assembly |
Moon Chun |
2014-04-15 |
| 8697553 |
Solar cell fabrication with faceting and ion implantation |
Edward S. Murrer |
2014-04-15 |
| 8124499 |
Method and structure for thick layer transfer using a linear accelerator |
Francois J. Henley, Albert Lamm |
2012-02-28 |
| 7225047 |
Method, system and medium for controlling semiconductor wafer processes using critical dimension measurements |
Amir Al-Bayati, Majeed A. Foad, Sasson Somekh |
2007-05-29 |
| 6200883 |
Ion implantation method |
Mitchell Taylor, Majeed A. Foad |
2001-03-13 |
| 6093625 |
Apparatus for and methods of implanting desired chemical species in semiconductor substrates |
Dennis W. Wagner, Michael T. Wauk, II, Matthew Castle |
2000-07-25 |
| 5932882 |
Ion implanter with post mass selection deceleration |
Jonathan Gerald England, Mitchell Taylor |
1999-08-03 |
| 5883391 |
Ion implantation apparatus and a method of monitoring high energy neutral contamination in an ion implantation process |
Jonathan Gerald England, Stephen Moffatt, Jose Antonio Marin |
1999-03-16 |
