Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11255013 | Ion implantation for modification of thin film coatings on glass | Terry Bluck | 2022-02-22 |
| 10854772 | Multi-piece substrate holder and alignment mechanism | Hoang Huy Vu, Terry Bluck | 2020-12-01 |
| 10636935 | Ion implant system having grid assembly | Moon Chun | 2020-04-28 |
| 10559710 | System of height and alignment rollers for precise alignment of wafers for ion implantation | William Eugene Runstadler, Jr., Terry Bluck | 2020-02-11 |
| 10446430 | Patterned chuck for substrate processing | Terry Bluck, Vinay Prabhakar, William Eugene Runstadler, Jr. | 2019-10-15 |
| 9875922 | Substrate processing system and method | Terry Pederson, Henry Hieslmair, Moon Chun, Vinay Prabhakar, Terry Bluck | 2018-01-23 |
| 9850570 | Ion implantation for modification of thin film coatings on glass | Terry Bluck | 2017-12-26 |
| 9741894 | Ion implant system having grid assembly | Moon Chun | 2017-08-22 |
| 9583661 | Grid for plasma ion implant | Vinay Prabhakar | 2017-02-28 |
| 9543114 | Implant masking and alignment system with rollers | Vinay Prabhakar, Terry Bluck | 2017-01-10 |
| 9324598 | Substrate processing system and method | Terry Pederson, Henry Hieslmair, Moon Chun, Vinay Prabhakar, Terry Bluck | 2016-04-26 |
| 9318332 | Grid for plasma ion implant | Vinay Prabhakar | 2016-04-19 |
| 9303314 | Ion implant system having grid assembly | Moon Chun | 2016-04-05 |
| 8997688 | Ion implant system having grid assembly | Moon Chun | 2015-04-07 |
| 8871619 | Application specific implant system and method for use in solar cell fabrications | Edward S. Murrer | 2014-10-28 |
| 8749053 | Plasma grid implant system for use in solar cell fabrications | Moon Chun | 2014-06-10 |
| 8697552 | Method for ion implant using grid assembly | Moon Chun | 2014-04-15 |
| 8697553 | Solar cell fabrication with faceting and ion implantation | Edward S. Murrer | 2014-04-15 |
| 8124499 | Method and structure for thick layer transfer using a linear accelerator | Francois J. Henley, Albert Lamm | 2012-02-28 |
| 7225047 | Method, system and medium for controlling semiconductor wafer processes using critical dimension measurements | Amir Al-Bayati, Majeed A. Foad, Sasson Somekh | 2007-05-29 |
| 6200883 | Ion implantation method | Mitchell Taylor, Majeed A. Foad | 2001-03-13 |
| 6093625 | Apparatus for and methods of implanting desired chemical species in semiconductor substrates | Dennis W. Wagner, Michael T. Wauk, II, Matthew Castle | 2000-07-25 |
| 5932882 | Ion implanter with post mass selection deceleration | Jonathan Gerald England, Mitchell Taylor | 1999-08-03 |
| 5883391 | Ion implantation apparatus and a method of monitoring high energy neutral contamination in an ion implantation process | Jonathan Gerald England, Stephen Moffatt, Jose Antonio Marin | 1999-03-16 |