Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6525327 | Ion implanter and beam stop therefor | Robert J. Mitchell, John Ruffell, Hilton F. Glavish, Peter Kindersley | 2003-02-25 |
| 6093456 | Beam stop apparatus for an ion implanter | Jonathan Gerald England, David R. Burgin, Ryoji Todaka | 2000-07-25 |
| 6093625 | Apparatus for and methods of implanting desired chemical species in semiconductor substrates | Dennis W. Wagner, Matthew Castle, Babak Adibi | 2000-07-25 |
| 5389793 | Apparatus and methods for ion implantation | Derek Aitken, Frederick J. Robinson | 1995-02-14 |
| 5126576 | Method and apparatus for controlling the rate of emission of electrons used for charge neutralization in ion implantation | Bernard Thomas Woods, Jose Antonio Marin, Nicholas Bright | 1992-06-30 |
| 4776744 | Systems and methods for wafer handling in semiconductor process equipment | Paul R. Stonestreet, Clive Allum, Bert Webber, Richard Cooke, Frederick J. Robinson | 1988-10-11 |
| 4733091 | Systems and methods for ion implantation of semiconductor wafers | Frederick J. Robinson | 1988-03-22 |