Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5886355 | Ion implantation apparatus having increased source lifetime | Paul A. Burfield, John Pontefract, Bernard Harrison, Peter Meares, David R. Burgin +2 more | 1999-03-23 |
| 5554852 | Ion implantation having increased source lifetime | Paul A. Burfield, John Pontefract, Bernard Harrison, Peter Meares, David R. Burgin +2 more | 1996-09-10 |
| 5517077 | Ion implantation having increased source lifetime | Paul A. Burfield, John Pontefract, Bernard Harrison, Peter Meares, David R. Burgin +2 more | 1996-05-14 |
| 5262652 | Ion implantation apparatus having increased source lifetime | Paul A. Burfield, John Pontefract, Bernard Harrison, Peter Meares, David R. Burgin +2 more | 1993-11-16 |
| 5130552 | Improved ion implantation using a variable mass resolving system | David R. Burgin, Timothy G. Morgan, Craig Lowrie, Hiroyuki Ito | 1992-07-14 |
| 5126576 | Method and apparatus for controlling the rate of emission of electrons used for charge neutralization in ion implantation | Michael T. Wauk, II, Bernard Thomas Woods, Jose Antonio Marin | 1992-06-30 |
| 4754200 | Systems and methods for ion source control in ion implanters | Frederick Plumb, Christopher P. Wright, Derek Aitken, Bernard Harrison | 1988-06-28 |
| 4743767 | Systems and methods for ion implantation | Frederick Plumb, Christopher P. Wright, Derek Aitken, Bernard Harrison | 1988-05-10 |