| 5886355 |
Ion implantation apparatus having increased source lifetime |
Paul A. Burfield, John Pontefract, Bernard Harrison, Peter Meares, David R. Burgin +2 more |
1999-03-23 |
| 5554852 |
Ion implantation having increased source lifetime |
Paul A. Burfield, John Pontefract, Bernard Harrison, Peter Meares, David R. Burgin +2 more |
1996-09-10 |
| 5517077 |
Ion implantation having increased source lifetime |
Paul A. Burfield, John Pontefract, Bernard Harrison, Peter Meares, David R. Burgin +2 more |
1996-05-14 |
| 5262652 |
Ion implantation apparatus having increased source lifetime |
Paul A. Burfield, John Pontefract, Bernard Harrison, Peter Meares, David R. Burgin +2 more |
1993-11-16 |
| 5130552 |
Improved ion implantation using a variable mass resolving system |
David R. Burgin, Timothy G. Morgan, Craig Lowrie, Hiroyuki Ito |
1992-07-14 |
| 5126576 |
Method and apparatus for controlling the rate of emission of electrons used for charge neutralization in ion implantation |
Michael T. Wauk, II, Bernard Thomas Woods, Jose Antonio Marin |
1992-06-30 |
| 4754200 |
Systems and methods for ion source control in ion implanters |
Frederick Plumb, Christopher P. Wright, Derek Aitken, Bernard Harrison |
1988-06-28 |
| 4743767 |
Systems and methods for ion implantation |
Frederick Plumb, Christopher P. Wright, Derek Aitken, Bernard Harrison |
1988-05-10 |
