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Method of implanting a substrate and an ion implanter for performing the method |
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Method of implanting a substrate and an ion implanter for performing the method |
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Method of implanting a substrate and an ion implanter for performing the method |
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Method of implanting a substrate and an ion implanter for performing the method |
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Multi-directional scanning of movable member and ion beam monitoring arrangement therefor |
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Method of implanting a substrate and an ion implanter for performing the method |
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Ion implantation beam monitor |
— |
2003-08-19 |
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Ion beam generation apparatus |
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Ion implantation apparatus having increased source lifetime |
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Ion implantation apparatus with improved post mass selection deceleration |
Frederick Plumb |
1998-05-05 |
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Ion implantation having increased source lifetime |
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Ion implantation having increased source lifetime |
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Ion implantation apparatus having increased source lifetime |
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Systems and methods for ion source control in ion implanters |
Frederick Plumb, Christopher P. Wright, Nicholas Bright, Derek Aitken |
1988-06-28 |
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Systems and methods for ion implantation |
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1988-05-10 |
