| 7282427 |
Method of implanting a substrate and an ion implanter for performing the method |
Adrian Murrell, Peter Edwards, Peter Kindersley, Craig Lowrie, Peter Michael Banks +4 more |
2007-10-16 |
$76,989,000 |
| 7253424 |
Method of implanting a substrate and an ion implanter for performing the method |
Adrian Murrell, Peter Edwards, Peter Kindersley, Craig Lowrie, Peter Michael Banks +4 more |
2007-08-07 |
$22,752,000 |
| 7235797 |
Method of implanting a substrate and an ion implanter for performing the method |
Adrian Murrell, Peter Edwards, Peter Kindersley, Takao Sakase, Marvin Farley +2 more |
2007-06-26 |
$17,529,000 |
| 7049210 |
Method of implanting a substrate and an ion implanter for performing the method |
Adrian Murrell, Peter Edwards, Peter Kindersley, Craig Lowrie, Peter Michael Banks +4 more |
2006-05-23 |
$10,996,000 |
| 6956223 |
Multi-directional scanning of movable member and ion beam monitoring arrangement therefor |
Theodore H. Smick, Frank D. Roberts, II, Marvin Farley, Geoffrey Ryding, Takao Sakase +2 more |
2005-10-18 |
$29,253,000 |
| 6908836 |
Method of implanting a substrate and an ion implanter for performing the method |
Adrian Murrell, Peter Edwards, Peter Kindersley, Takao Sakase, Marvin Farley +2 more |
2005-06-21 |
$30,094,000 |
| 6608316 |
Ion implantation beam monitor |
— |
2003-08-19 |
$39,032,000 |
| 6559454 |
Ion beam generation apparatus |
Adrian Murrell, Erik J. H. Collart, Amir Al-Bayati, Chris James Burgess, David George Armour +4 more |
2003-05-06 |
$19,934,000 |
| 5886355 |
Ion implantation apparatus having increased source lifetime |
Nicholas Bright, Paul A. Burfield, John Pontefract, Peter Meares, David R. Burgin +2 more |
1999-03-23 |
$25,350,000 |
| 5747936 |
Ion implantation apparatus with improved post mass selection deceleration |
Frederick Plumb |
1998-05-05 |
$24,269,000 |
| 5554852 |
Ion implantation having increased source lifetime |
Nicholas Bright, Paul A. Burfield, John Pontefract, Peter Meares, David R. Burgin +2 more |
1996-09-10 |
$56,749,000 |
| 5517077 |
Ion implantation having increased source lifetime |
Nicholas Bright, Paul A. Burfield, John Pontefract, Peter Meares, David R. Burgin +2 more |
1996-05-14 |
$31,675,000 |
| 5262652 |
Ion implantation apparatus having increased source lifetime |
Nicholas Bright, Paul A. Burfield, John Pontefract, Peter Meares, David R. Burgin +2 more |
1993-11-16 |
$30,627,000 |
| 4754200 |
Systems and methods for ion source control in ion implanters |
Frederick Plumb, Christopher P. Wright, Nicholas Bright, Derek Aitken |
1988-06-28 |
$7,920,000 |
| 4743767 |
Systems and methods for ion implantation |
Frederick Plumb, Christopher P. Wright, Nicholas Bright, Derek Aitken |
1988-05-10 |
$6,703,000 |
