Ion implantation apparatus having increased source lifetime

Assignee

• Applied Materials

Inventors

• Nicholas Bright (8 patents)
• Paul A. Burfield (5 patents)
• John Pontefract (5 patents)
• Bernard Harrison (15 patents)
• Peter Meares (4 patents)
• David R. Burgin (9 patents)
• Andrew Stephen Devaney (8 patents)
• Peter Kindersley (13 patents)

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