| 7004234 |
Vaporizer for generating feed gas for an arc chamber |
Simon Povall, John Pontefract, Michael Joseph King |
2006-02-28 |
| 6897457 |
Apparatus and method for monitoring and tuning an ion beam in ion implantation apparatus |
Andrew Holmes, Simon Povall, David George Armour, Drew Arnold |
2005-05-24 |
| 6093456 |
Beam stop apparatus for an ion implanter |
Jonathan Gerald England, Michael T. Wauk, II, Ryoji Todaka |
2000-07-25 |
| 5920076 |
Ion beam apparatus |
David Loome, Simon Povall |
1999-07-06 |
| 5886355 |
Ion implantation apparatus having increased source lifetime |
Nicholas Bright, Paul A. Burfield, John Pontefract, Bernard Harrison, Peter Meares +2 more |
1999-03-23 |
| 5554852 |
Ion implantation having increased source lifetime |
Nicholas Bright, Paul A. Burfield, John Pontefract, Bernard Harrison, Peter Meares +2 more |
1996-09-10 |
| 5517077 |
Ion implantation having increased source lifetime |
Nicholas Bright, Paul A. Burfield, John Pontefract, Bernard Harrison, Peter Meares +2 more |
1996-05-14 |
| 5262652 |
Ion implantation apparatus having increased source lifetime |
Nicholas Bright, Paul A. Burfield, John Pontefract, Bernard Harrison, Peter Meares +2 more |
1993-11-16 |
| 5130552 |
Improved ion implantation using a variable mass resolving system |
Nicholas Bright, Timothy G. Morgan, Craig Lowrie, Hiroyuki Ito |
1992-07-14 |
