| 8281738 |
Cathode and counter-cathode arrangement in an ion source |
Andrew Stephen Devaney, Richard Goldberg, Christopher Burgess, David Kirkwood |
2012-10-09 |
| 7586101 |
Ion sources for ion implantation apparatus |
Adrian Murrell, Richard Goldberg, Christopher Burgess, Erik J. H. Collart |
2009-09-08 |
| 7087913 |
Ion implanter electrodes |
Richard Goldberg, Christopher Burgess, Adrian Murrell |
2006-08-08 |
| 6897457 |
Apparatus and method for monitoring and tuning an ion beam in ion implantation apparatus |
Andrew Holmes, David R. Burgin, Simon Povall, Drew Arnold |
2005-05-24 |
| 6847043 |
Ion sources for ion implantation apparatus |
Adrian Murrell, Richard Goldberg, Christopher Burgess, Erik J. H. Collart |
2005-01-25 |
| 6777882 |
Ion beam generator |
Richard Goldberg, Christopher Burgess |
2004-08-17 |
| 6559454 |
Ion beam generation apparatus |
Adrian Murrell, Erik J. H. Collart, Bernard Harrison, Amir Al-Bayati, Chris James Burgess +4 more |
2003-05-06 |
| 6515408 |
Ion beam apparatus and a method for neutralizing space charge in an ion beam |
Jonathan Gerald England, Andrew Holmes, Jaap Van Den Berg, Stephen Moffatt |
2003-02-04 |
| 5969366 |
Ion implanter with post mass selection deceleration |
Jonathan Gerald England, Stephen Moffatt, Majeed A. Foad |
1999-10-19 |
| 5457324 |
Spectrum analyzer in an ion implanter |
Johnathan G. England, Neil Bryan, Jakob Albert Van Den Berg |
1995-10-10 |
| 5384465 |
Spectrum analyzer in an ion implanter |
Johnathan G. England, Neil Bryan, Jakob A. Van der Berg |
1995-01-24 |
