Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9947562 | Method and apparatus for processing semiconductor work pieces | Aihua Chen, Gerald Yin | 2018-04-17 |
| 7516833 | Multi-station workpiece processors, methods of processing semiconductor workpieces within multi-station workpiece processors, and methods of moving semiconductor workpieces within multi-station workpiece processors | — | 2009-04-14 |
| 6093456 | Beam stop apparatus for an ion implanter | Jonathan Gerald England, David R. Burgin, Michael T. Wauk, II | 2000-07-25 |