Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of implanting a substrate and an ion implanter for performing the method

Method of implanting a substrate and an ion implanter for performing the method

US Patent 7235797 · Granted Jun 26, 2007

Estimated economic value: $17,529,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Compact motor-driven insulated electrostatic particle accelerator2025
High temperature ion source2025
High energy implanter with small footprint2025
Neutron target for boron neutron capture therapy2024
Compact motor-driven insulated electrostatic particle accelerator2024
Apparatus and method for metal contamination control in an ion implantation syst2024
Ion beam filter for a neutron generator2023
Ion beam filter for a neutron generator2023
Method and system for surface modification of substrate for ion beam target2023
Ion source with multiple bias electrodes2023
Stepped indirectly heated cathode with improved shielding2022
Stepped indirectly heated cathode with improved shielding2022